Semiconductor device and method of forming electromagnetic (EM) shielding for LC circuits

ABSTRACT

A semiconductor device has a first component. A modular interconnect structure is disposed adjacent to the first component. A first interconnect structure is formed over the first component and modular interconnect structure. A shielding layer is formed over the first component, modular interconnect structure, and first interconnect structure. The shielding layer provides protection for the enclosed semiconductor devices against EMI, RFI, or other inter-device interference, whether generated internally or from external semiconductor devices. The shielding layer is electrically connected to an external low-impedance ground point. A second component is disposed adjacent to the first component. The second component includes a passive device. An LC circuit includes the first component and second component. A semiconductor die is disposed adjacent to the first component. A conductive adhesive is disposed over the modular interconnect structure. The modular interconnect structure includes a height less than a height of the first component.

CLAIM OF DOMESTIC PRIORITY

The present application is a continuation of U.S. patent applicationSer. No. 14/721,677, now U.S. Pat. No. 9,754,897, filed May 26, 2015,which claims the benefit of U.S. Provisional Application No. 62/006,787,filed Jun. 2, 2014, which applications are incorporated herein byreference.

FIELD OF THE INVENTION

The present invention relates in general to semiconductor devices and,more particularly, to a semiconductor device and method of formingsemiconductor packages with electromagnetic shielding for LC (inductorand capacitor) circuits.

BACKGROUND OF THE INVENTION

Semiconductor devices are commonly found in modern electronic products.Semiconductor devices vary in the number and density of electricalcomponents. Discrete semiconductor devices generally contain one type ofelectrical component, e.g., light emitting diode (LED), small signaltransistor, resistor, capacitor, inductor, and power metal oxidesemiconductor field effect transistor (MOSFET). Integrated semiconductordevices typically contain hundreds to millions of electrical components.Examples of integrated semiconductor devices include microcontrollers,microprocessors, and various signal processing circuits.

Semiconductor devices perform a wide range of functions such as signalprocessing, high-speed calculations, transmitting and receivingelectromagnetic signals, controlling electronic devices, transformingsunlight to electricity, and creating visual images for televisiondisplays. Semiconductor devices are found in the fields ofentertainment, communications, power conversion, networks, computers,and consumer products. Semiconductor devices are also found in militaryapplications, aviation, automotive, industrial controllers, and officeequipment.

Semiconductor devices exploit the electrical properties of semiconductormaterials. The structure of semiconductor material allows the material'selectrical conductivity to be manipulated by the application of anelectric field or base current or through the process of doping. Dopingintroduces impurities into the semiconductor material to manipulate andcontrol the conductivity of the semiconductor device.

A semiconductor device contains active and passive electricalstructures. Active structures, including bipolar and field effecttransistors, control the flow of electrical current. By varying levelsof doping and application of an electric field or base current, thetransistor either promotes or restricts the flow of electrical current.Passive structures, including resistors, capacitors, and inductors,create a relationship between voltage and current necessary to perform avariety of electrical functions. The passive and active structures areelectrically connected to form circuits, which enable the semiconductordevice to perform high-speed operations and other useful functions.

Semiconductor devices are generally manufactured using two complexmanufacturing processes, i.e., front-end manufacturing and back-endmanufacturing, each involving potentially hundreds of steps. Front-endmanufacturing involves the formation of a plurality of die on thesurface of a semiconductor wafer. Each semiconductor die is typicallyidentical and contains circuits formed by electrically connecting activeand passive components. Back-end manufacturing involves singulatingindividual semiconductor die from the finished wafer and packaging thedie to provide structural support, electrical interconnect, andenvironmental isolation. The term “semiconductor die” as used hereinrefers to both the singular and plural form of the words, andaccordingly, can refer to both a single semiconductor device andmultiple semiconductor devices.

One goal of semiconductor manufacturing is to produce smallersemiconductor devices. Smaller devices typically consume less power,have higher performance, and can be produced more efficiently. Inaddition, smaller semiconductor devices have a smaller footprint, whichis desirable for smaller end products. A smaller semiconductor die sizecan be achieved by improvements in the front-end process resulting insemiconductor die with smaller, higher density active and passivecomponents. Back-end processes may result in semiconductor devicepackages with a smaller footprint by improvements in electricalinterconnection and packaging materials.

Another goal of semiconductor manufacturing is to produce higherperformance semiconductor devices. Increases in device performance canbe accomplished by forming active components that are capable ofoperating at higher speeds. In high frequency applications, such asradio frequency (RF) wireless communications, integrated passive devices(IPDs) are often contained within the semiconductor device. Examples ofIPDs include resistors, capacitors, and inductors. A typical RF systemrequires multiple IPDs in one or more semiconductor packages to performthe necessary electrical functions. However, high frequency electricaldevices generate or are susceptible to undesired electromagneticinterference (EMI) and radio frequency interference (RFI), or otherinter-device interference, such as capacitive, inductive, or conductivecoupling, also known as cross-talk, which can interfere with deviceoperation.

SUMMARY OF THE INVENTION

A need exists to isolate semiconductor die from EMI, RFI, and otherinter-device interference. Accordingly, in one embodiment, the presentinvention is a method of making a semiconductor device comprising thesteps of providing a first component, disposing a modular interconnectstructure adjacent to the first component, forming a first interconnectstructure over the first component and modular interconnect structure,and forming a shielding layer over the first component, modularinterconnect structure, and first interconnect structure.

In another embodiment, the present invention is a method of making asemiconductor device comprising the steps of providing a firstcomponent, disposing an encapsulant over the first component, forming afirst interconnect structure over the first component and encapsulant,and forming a shielding layer over the first component, encapsulant, andfirst interconnect structure.

In another embodiment, the present invention is a semiconductor devicecomprising a first component. A modular interconnect structure isdisposed adjacent to the first component. A first interconnect structureis formed over the first component and modular interconnect structure. Ashielding layer is formed over the first component, modular interconnectstructure, and first interconnect structure.

In another embodiment, the present invention is a semiconductor devicecomprising a first component. An encapsulant is disposed over the firstcomponent. A first interconnect structure is formed over the firstcomponent and encapsulant. A shielding layer is formed over the firstcomponent, encapsulant, and first interconnect structure.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a printed circuit board (PCB) with different types ofpackages mounted to a surface of the PCB;

FIGS. 2a-2d illustrate a semiconductor wafer with a plurality ofsemiconductor die separated by a saw street;

FIG. 3 illustrates a PCB unit for connecting EMI shielding to aredistribution layer (RDL) ground plane;

FIG. 4 illustrates a plan view of a layout for using PCB units asgrounding connections;

FIGS. 5a-5m illustrate a method of making an EMI shielded moduleincluding corner PCB units;

FIGS. 6a-6b illustrate another method of singulating an EMI shieldedmodule;

FIGS. 7a-7h illustrate a method of making an EMI shielded moduleincluding side PCB units;

FIGS. 8a-8f illustrate a method of making an EMI shielded moduleincluding tall PCB units;

FIGS. 9a-9h illustrate a method of making an EMI shielded moduleincluding an embedded conductive shielding cage;

FIGS. 10a-10b illustrate other EMI shielded modules including shieldingcages;

FIGS. 11a-11b illustrate other EMI shielded modules including athermally enhanced adhesive;

FIGS. 12a-12j illustrate another method of making EMI shielded modulesincluding trenches formed in the encapsulant;

FIGS. 13a-13f illustrate another method of making EMI shielding modulesincluding RDL side teeth;

FIGS. 14a-14d illustrate another method of making an EMI shieldedmodule;

FIGS. 15a-15e illustrate other EMI shielded modules includingsemiconductor die;

FIGS. 16a-16d illustrate a method of making an EMI shielded moduleincluding side PCB units; and

FIGS. 17a-17b illustrate other EMI shielded modules including side PCBunits.

DETAILED DESCRIPTION OF THE DRAWINGS

The present invention is described in one or more embodiments in thefollowing description with reference to the figures, in which likenumerals represent the same or similar elements. While the invention isdescribed in terms of the best mode for achieving objectives of theinvention, those skilled in the art will appreciate that the disclosureis intended to cover alternatives, modifications, and equivalents as maybe included within the spirit and scope of the invention as defined bythe appended claims and claims equivalents as supported by the followingdisclosure and drawings.

Semiconductor devices are generally manufactured using two complexmanufacturing processes: front-end manufacturing and back-endmanufacturing. Front-end manufacturing involves the formation of aplurality of die on the surface of a semiconductor wafer. Each die onthe wafer contains active and passive electrical components, which areelectrically connected to form functional electrical circuits. Activeelectrical components, such as transistors and diodes, have the abilityto control the flow of electrical current. Passive electricalcomponents, such as capacitors, inductors, and resistors, create arelationship between voltage and current necessary to perform electricalcircuit functions.

Passive and active components are formed over the surface of thesemiconductor wafer by a series of process steps including doping,deposition, photolithography, etching, and planarization. Dopingintroduces impurities into the semiconductor material by techniques suchas ion implantation or thermal diffusion. The doping process modifiesthe electrical conductivity of semiconductor material in active devicesby dynamically changing the semiconductor material conductivity inresponse to an electric field or base current. Transistors containregions of varying types and degrees of doping arranged as necessary toenable the transistor to promote or restrict the flow of electricalcurrent upon the application of the electric field or base current.

Active and passive components are formed by layers of materials withdifferent electrical properties. The layers can be formed by a varietyof deposition techniques determined in part by the type of materialbeing deposited. For example, thin film deposition can involve chemicalvapor deposition (CVD), physical vapor deposition (PVD), electrolyticplating, and electroless plating processes. Each layer is generallypatterned to form portions of active components, passive components, orelectrical connections between components.

Back-end manufacturing refers to cutting or singulating the finishedwafer into the individual semiconductor die and packaging thesemiconductor die for structural support, electrical interconnect, andenvironmental isolation. To singulate the semiconductor die, the waferis scored and broken along non-functional regions of the wafer calledsaw streets or scribes. The wafer is singulated using a laser cuttingtool or saw blade. After singulation, the individual semiconductor dieare mounted to a package substrate that includes pins or contact padsfor interconnection with other system components. Contact pads formedover the semiconductor die are then connected to contact pads within thepackage. The electrical connections can be made with conductive layers,bumps, stud bumps, conductive paste, or wirebonds. An encapsulant orother molding material is deposited over the package to provide physicalsupport and electrical isolation. The finished package is then insertedinto an electrical system and the functionality of the semiconductordevice is made available to the other system components.

FIG. 1 illustrates electronic device 50 having a chip carrier substrateor PCB 52 with a plurality of semiconductor packages mounted on asurface of PCB 52. Electronic device 50 can have one type ofsemiconductor package, or multiple types of semiconductor packages,depending on the application. The different types of semiconductorpackages are shown in FIG. 1 for purposes of illustration.

Electronic device 50 can be a stand-alone system that uses thesemiconductor packages to perform one or more electrical functions.Alternatively, electronic device 50 can be a subcomponent of a largersystem. For example, electronic device 50 can be part of a tablet,cellular phone, digital camera, or other electronic device.Alternatively, electronic device 50 can be a graphics card, networkinterface card, or other signal processing card that can be insertedinto a computer. The semiconductor package can include microprocessors,memories, application specific integrated circuits (ASIC),microelectromechanical systems (MEMS), logic circuits, analog circuits,RF circuits, discrete devices, or other semiconductor die or electricalcomponents. Miniaturization and weight reduction are essential for theproducts to be accepted by the market. The distance betweensemiconductor devices may be decreased to achieve higher density.

In FIG. 1, PCB 52 provides a general substrate for structural supportand electrical interconnect of the semiconductor packages mounted on thePCB. Conductive signal traces 54 are formed over a surface or withinlayers of PCB 52 using evaporation, electrolytic plating, electrolessplating, screen printing, or other suitable metal deposition process.Signal traces 54 provide for electrical communication between each ofthe semiconductor packages, mounted components, and other externalsystem components. Traces 54 also provide power and ground connectionsto each of the semiconductor packages.

In some embodiments, a semiconductor device has two packaging levels.First level packaging is a technique for mechanically and electricallyattaching the semiconductor die to an intermediate substrate. Secondlevel packaging involves mechanically and electrically attaching theintermediate substrate to the PCB. In other embodiments, a semiconductordevice may only have the first level packaging where the die ismechanically and electrically mounted directly to the PCB.

For the purpose of illustration, several types of first level packaging,including bond wire package 56 and flipchip 58, are shown on PCB 52.Additionally, several types of second level packaging, including ballgrid array (BGA) 60, bump chip carrier (BCC) 62, land grid array (LGA)66, multi-chip module (MCM) 68, quad flat non-leaded package (QFN) 70,quad flat package 72, embedded wafer level ball grid array (eWLB) 74,and wafer level chip scale package (WLCSP) 76 are shown mounted on PCB52. In one embodiment, eWLB 74 is a fan-out wafer level package (Fo-WLP)and WLCSP 76 is a fan-in wafer level package (Fi-WLP). Depending uponthe system requirements, any combination of semiconductor packages,configured with any combination of first and second level packagingstyles, as well as other electronic components, can be connected to PCB52. In some embodiments, electronic device 50 includes a single attachedsemiconductor package, while other embodiments call for multipleinterconnected packages. By combining one or more semiconductor packagesover a single substrate, manufacturers can incorporate pre-madecomponents into electronic devices and systems. Because thesemiconductor packages include sophisticated functionality, electronicdevices can be manufactured using less expensive components and astreamlined manufacturing process. The resulting devices are less likelyto fail and less expensive to manufacture resulting in a lower cost forconsumers.

FIG. 2a shows a semiconductor wafer 80 with a base substrate material82, such as silicon, germanium, aluminum phosphide, aluminum arsenide,gallium arsenide, gallium nitride, indium phosphide, silicon carbide, orother bulk semiconductor material for structural support. A plurality ofsemiconductor die or components 84 is formed on wafer 80 separated by anon-active, inter-die wafer area or saw street 86 as described above.Saw street 86 provides cutting areas to singulate semiconductor wafer 80into individual semiconductor die 84. In one embodiment, semiconductorwafer 80 has a width or diameter of 100-450 millimeters (mm).

FIG. 2b shows a cross-sectional view of a portion of semiconductor wafer80. Each semiconductor die 84 has a back or non-active surface 88 and anactive surface 90 containing analog or digital circuits implemented asactive devices, passive devices, conductive layers, and dielectriclayers formed within the die and electrically interconnected accordingto the electrical design and function of the die. For example, thecircuit may include one or more transistors, diodes, and other circuitelements formed within active surface 90 to implement analog circuits ordigital circuits, such as digital signal processor (DSP), ASIC, MEMS,memory, or other signal processing circuit. In one embodiment, activesurface 90 contains a MEMS, such as an accelerometer, gyroscope, straingauge, microphone, or other sensor responsive to various externalstimuli.

Semiconductor die 84 may contain baseband circuits that are susceptibleto EMI, RFI, and other interference generated by other devices. In oneembodiment, semiconductor die 84 may contain IPD that generate EMI orRFI. For example, the IPDs contained within semiconductor die 84 providethe electrical characteristics needed for high frequency applications,such as high-pass filters, low-pass filters, band-pass filters,symmetric Hi-Q resonant transformers, and tuning capacitors. The IPDscan be used as front-end wireless RF components, which can be positionedbetween the antenna and transceiver. The IPD inductor can be a hi-Qbalun, transformer, or coil, operating up to 100 Gigahertz. In someapplications, multiple baluns are formed on a same substrate, allowingmulti-band operation. For example, two or more baluns are used in aquad-band for mobile phones or other global system for mobile (GSM)communications, each balun dedicated for a frequency band of operationof the quad-band device. In such systems, the output signal in thetransmitter section of the radio frequency integrated circuit (RFIC) mayinterfere with the local oscillator (LO). The inductor can be used inthe tank resonators of the LO in the RF transceiver. The LO includes avoltage-controlled oscillator (VCO) that is synchronized to an externalcrystal reference through a phase-locked loop (PLL). The VCO can beimplemented as a cross-coupled amplifier circuit with a tuned resonantinductor-capacitor (LC) load. The inductor is made with one or twospiral inductor coils on the RFIC. External signals can couple into theVCO by magnetic induction directly into the tank resonator. If theexternal source is a periodic or quasi-periodic signal, it willintroduce a spurious tone. In subsequent mixing, the RF signal ismultiplied by the LO signal to transpose the band of interest down tolow frequency for further signal processing. The presence of thespurious tone in the LO often causes out-of-band signals to be mixedinto the base-band frequency range, which degrades the receiversensitivity, adding both noise and cross-talk to the received signal.Therefore, each of these passive circuit elements has the potential tointerfere with adjacent devices.

An electrically conductive layer 92 is formed over active surface 90 ofsemiconductor die 84 using PVD, CVD, electrolytic plating, electrolessplating process, or other suitable metal deposition process. Conductivelayer 92 includes one or more layers of aluminum (Al), copper (Cu), tin(Sn), nickel (Ni), gold (Au), silver (Ag), or other suitableelectrically conductive material or combination thereof. Conductivelayer 92 operates as contact pads electrically connected to the circuitson active surface 90. Conductive layer 92 is formed as contact padsdisposed side-by-side a first distance from the edge of semiconductordie 84, as shown in FIG. 2b . Alternatively, conductive layer 92 isformed as contact pads that are offset in multiple rows such that afirst row of contact pads is disposed a first distance from the edge ofthe die, and a second row of contact pads alternating with the first rowis disposed a second distance from the edge of the die. In oneembodiment, back surface 88 of semiconductor wafer 80 undergoes anoptional backgrinding operation with a grinder or other suitablemechanical or etching process to remove a portion of base substratematerial 82 and reduce the thickness of semiconductor wafer 80 includingsemiconductor die 84.

Semiconductor wafer 80 undergoes electrical testing and inspection aspart of a quality control process. Manual visual inspection andautomated optical systems are used to perform inspections onsemiconductor wafer 80. Software can be used in the automated opticalanalysis of semiconductor wafer 80. Visual inspection methods may employequipment such as a scanning electron microscope, high-intensity orultra-violet light, or metallurgical microscope. Semiconductor wafer 80is inspected for structural characteristics including warpage, thicknessvariation, surface particulates, irregularities, cracks, delamination,and discoloration.

The active and passive components within semiconductor die 84 undergotesting at the wafer level for electrical performance and circuitfunction. Each semiconductor die 84 is tested for functionality andelectrical parameters, as shown in FIG. 2c , using a test probe head 94including a plurality of probes or test leads 96, or other testingdevice. Probes 96 are used to make electrical contact with nodes orconductive layer 92 on each semiconductor die 84 and provide electricalstimuli to the contact pads. Semiconductor die 84 responds to theelectrical stimuli, which is measured by computer test system 97 andcompared to an expected response to test functionality of thesemiconductor die. The electrical tests may include circuitfunctionality, lead integrity, resistivity, continuity, reliability,junction depth, electro-static discharge (ESD), RF performance, drivecurrent, threshold current, leakage current, and operational parametersspecific to the component type. The inspection and electrical testing ofsemiconductor wafer 80 enables semiconductor die 84 that pass to bedesignated as known good die (KGD) for use in a semiconductor package.

In FIG. 2d , semiconductor wafer 80 is singulated through saw street 86using a saw blade or laser cutting tool 98 into individual semiconductordie 84. Individual semiconductor die 84 can be inspected andelectrically tested for identification of KGD post singulation.

FIG. 3 shows a PCB unit 100 with base material 102 such as metal,silicon, polymer, polymer composite, ceramic, glass, glass epoxy,beryllium oxide, or other suitable low-cost, rigid material or bulksemiconductor material for structural support. Alternatively, basematerial 102 can be one or more laminated layers ofpolytetrafluoroethylene pre-impregnated (prepreg), FR-4, FR-1, CEM-1, orCEM-3 with a combination of phenolic cotton paper, epoxy, resin, wovenglass, matte glass, polyester, and other reinforcement fibers orfabrics.

Conductive layer 104 and optional conductive layer 106 are formed onopposing surfaces of base material 102. Conductive layers 104 and 106can be one or more layers of Al, Cu, Sn, Ni, Au, Ag, or other suitableelectrically conductive material formed by electrolytic plating orelectroless plating for electrical interconnect. The layout ofconductive layers 104 and 106 and base material 102 typically uses silkscreen printing, photoengraving, PCB milling, electroless plating, orelectroplating process.

Optional z-direction vertical interconnect conductive plated throughholes (PTH) 108 are formed through base material 102 when optionalconductive layer 106 is present. A plurality of vias is formed throughbase material 102 using laser drilling, mechanical drilling, or deepreactive ion etching (DRIE). The vias are filled with Al, Cu, Sn, Ni,Au, Ag, titanium (Ti), tungsten (W), poly-silicon, or other suitableelectrically conductive material using electrolytic plating, electrolessplating process, or other suitable metal deposition process to formz-direction vertical interconnect conductive PTH 108. In one embodiment,i.e., without optional conductive layer 106 or optional PTH 108, basematerial 102 is conductive.

Insulating or passivation layers 110 and 112 are formed over opposingsurfaces of PCB unit 100 using PVD, CVD, printing, spin coating, spraycoating, sintering or thermal oxidation. Insulating layers 110 and 112contain one or more layers of silicon dioxide (SiO2), silicon nitride(Si3N4), silicon oxynitride (SiON), tantalum pentoxide (Ta2O5), aluminumoxide (Al2O3), or other material having similar insulating andstructural properties. Insulating layer 110 forms front surface 114 ofPCB unit 100. Insulating layer 112 forms back surface 116 of PCB unit100. A portion of insulating layers 110 and 112 is removed by an etchingprocess to expose conductive layers 104 and 106. In one embodiment,removing the portion of insulating layer 110 and 112 expose PTH 108. PCBunit 100 acts as a modular interconnect structure providing connectivityto module 118.

FIG. 4 shows a plan view of a portion of a layout for forming modules118 with three components 120-124. FIG. 4 shows four modules 118,although any number of modules may be formed. Each corner of each module118 includes PCB unit 100. The layout shown in FIG. 4 includes aseparation region or saw street 126 between each module 118. Components120-124 may be semiconductor die 84 containing IPDs, or discrete passivedevices such as inductors, capacitors, and resistors. In one embodiment,components 120 and 122 are inductors and component 124 is a capacitorwith specifications listed in Table 1.

TABLE 1 Component Data IMPERIAL METRI COMPONENT VALUE TOLERANCE CODECODE L W T 120 1 uH +/−20% 1008 2520 2.5 ± 0.2 2.0 ± 0.2 1.0max 122 1 uH+/−20% 0806 2016 2.0 ± 0.2 1.6 ± 0.2 1.0max 124 22 uF +/−20% 0603 16081.6 ± 0.1 0.8 ± 0.1 1.0max

FIGS. 5a-5m illustrate, in relation to FIG. 1, a method of forming anEMI shielded module with three components 120-124. FIG. 5a shows across-sectional view of a portion of a carrier or temporary substrate130 containing sacrificial base material such as silicon, polymer,beryllium oxide, glass, or other suitable low-cost, rigid material forstructural support. An interface layer or double-sided tape 132 isformed over carrier 130 as a temporary adhesive bonding film, etch-stoplayer, or thermal release layer.

Carrier 130 can be a round or rectangular panel (greater than 300 mm)with capacity for multiple components 120-124 or semiconductor die 84.Carrier 130 may have a larger surface area than the surface area ofsemiconductor wafer 80. A larger carrier reduces the manufacturing costof the semiconductor package as more components or semiconductor die canbe processed on the larger carrier thereby reducing the cost per unit.Semiconductor packaging and processing equipment are designed andconfigured for the size of the wafer or carrier being processed.

To further reduce manufacturing costs, the size of carrier 130 isselected independent of the size of components 120-124, semiconductordie 84, or semiconductor wafer 80. That is, carrier 130 has a fixed orstandardized size, which can accommodate various size components 120-124or semiconductor die 84 singulated from one or more semiconductor wafers80. In one embodiment, carrier 130 is circular with a diameter of 330mm. In another embodiment, carrier 130 is rectangular with a width of560 mm and length of 600 mm. Semiconductor die 84 may have dimensions of10 mm by 10 mm, which are placed on the standardized carrier 130.Alternatively, semiconductor die 84 may have dimensions of 20 mm by 20mm, which are placed on the same standardized carrier 130. Modules 118may have dimensions of 3 mm by 5 mm. Accordingly, standardized carrier130 can handle any size of components 120-124 or semiconductor die 84,which allows subsequent semiconductor processing equipment to bestandardized to a common carrier, i.e., independent of die size orincoming wafer size. Semiconductor packaging equipment can be designedand configured for a standard carrier using a common set of processingtools, equipment, and bill of materials to process any semiconductor diesize from any incoming wafer size. The common or standardized carrier130 lowers manufacturing costs and capital risk by reducing oreliminating the need for specialized semiconductor processing linesbased on die size or incoming wafer size. By selecting a predeterminedcarrier size to use for any size component or semiconductor die from allsemiconductor wafer sizes, a flexible manufacturing line can beimplemented.

PCB units 100 from FIG. 3 and components 120-124 or semiconductor die 84from FIG. 2d are mounted to interface layer 132 and over carrier 130using, for example, a pick and place operation with front surface 114 ofPCB units 100 and active surface 90 of components 120-124 orsemiconductor die 84 oriented toward the carrier. PCB units 100 andcomponents 120-124 are arranged according to the layout shown in FIG. 4to form modules 118. FIG. 5a shows components 120-124 and PCB units 100mounted to interface layer 132 of carrier 130 as reconstituted panel orreconfigured wafer 134. PCB units 100 have a height less than a heightof components 120-124.

In FIG. 5b , an encapsulant or molding compound 136 deposited overreconstituted panel 134 including PCB units 100, components 120-124, andcarrier 130 using a paste printing, compressive molding, transfermolding, liquid encapsulant molding, vacuum lamination, or othersuitable applicator. In one embodiment, encapsulant 136 is depositedusing film-assisted molding process to leave a backside of components120-124 devoid of the encapsulant. Encapsulant 136 can be polymercomposite material, such as epoxy resin with filler, epoxy acrylate withfiller, or polymer with proper filler. Encapsulant 136 isnon-conductive, provides physical support, and environmentally protectsthe semiconductor device from external elements and contaminants.Encapsulant 136 is deposited between PCB units 100 and components120-124 to cover the side surfaces of PCB units 100 and components120-124. In one embodiment, encapsulant 136 includes surface 138 overback surface 116 of PCB units 100 and back surface 88 of components120-124.

In FIG. 5c , temporary carrier 130 and optional interface layer 132 areremoved from reconstituted panel 134 by chemical etching, mechanicalpeel-off, chemical mechanical planarization (CMP), mechanical grinding,thermal bake, laser scanning, or wet stripping. Front surface 114 of PCBunits 100 and active surface 90 of components 120-124 are exposed aftercarrier 130 and interface layer 132 are removed. FIG. 5d shows a planview of a portion of reconstituted panel 134 after encapsulation.

In FIG. 5e , a build-up interconnect structure 140 is formed over PCBunits 100, components 120-124, and encapsulant 136. Insulating orpassivation layer 142 is formed over front surface 114 of PCB units 100,components 120-124, and encapsulant 136 using PVD, CVD, printing, spincoating, spray coating, sintering or thermal oxidation. The insulatinglayer 142 contains one or more layers of SiO2, Si3N4, SiON, Ta2O5,Al2O3, or other material having similar insulating and structuralproperties. A portion of insulating layer 142 is removed by an etchingprocess to expose conductive layer 104 of PCB unit 100 and portions ofcomponents 120-124.

An electrically conductive layer 144 is formed over insulating layer142, conductive layer 104 of PCB unit 100, and components 120-124 usinga patterning and metal deposition process such as PVD, CVD, sputtering,electrolytic plating, electroless seed layer deposition, and electrolessplating. Conductive layer 144 includes one or more layers of Al, Cu, Ti,titanium tungsten (TiW), tin Sn, Ni, Au, Ag, W, or other suitableelectrically conductive material or combination thereof. Conductivelayer 144 operates as an RDL ground plane to provide EMI shielding formodule 118. In one embodiment, conductive layer 144 operates as an RDLto redistribute electrical connection from components 120-124 to outsidea footprint of module 118. One portion of conductive layer 144 iselectrically connected to conductive layer 104 of PCB unit 100, whileother portions of conductive layer 144 are electrically connected tocontact pads 92 of components 120-124. Still other portions ofconductive layer 144 are electrically common or electrically isolateddepending on the design and function of the semiconductor device.Conductive layer 144 electrically connects components 120-124 toconductive layer 104 of PCB units 100.

An insulating or passivation layer 146 is formed over insulating layer142 and conductive layer 144 using PVD, CVD, printing, spin coating,spray coating, sintering or thermal oxidation. Insulating layer 146includes one or more layers of SiO2, Si3N4, SiON, Ta2O5, Al2O3, lowtemperature curable polymer dielectric resist (i.e., cures at less than250° C.), benzocyclobutene (BCB), polybenzoxazoles (PBO), or epoxy basedphotosensitive polymer dielectric, or other material having similarinsulating and structural properties. A portion of insulating layer 146is removed by laser direct ablation (LDA) or an etching process througha patterned photoresist layer to expose portions of conductive layer144.

FIG. 5f shows a plan view of a portion of reconstituted panel 134including further detail of conductive layer or RDL ground plane 144.For purposes of illustration, FIG. 5f shows reconstituted panel 134without insulating layers 142 and 146. Conductive layer 144 iselectrically connected to PCB units 100 disposed at each corner of eachmodule 118 through conductive layer 104. Conductive layer 104 is furtherelectrically connected to conductive layer 106 through PTH 108 of PCBunit 100.

In FIG. 5g , an electrically conductive bump material is deposited overmodules 118 and electrically connected to conductive layer 144 using anevaporation, electrolytic plating, electroless plating, ball drop, orscreen printing process. The bump material includes Al, Sn, Ni, Au, Ag,lead (Pb), bismuth (Bi), Cu, solder, or combinations thereof, with anoptional flux solution. For example, the bump material can be eutecticSn/Pb, high-lead solder, or lead-free solder. The bump material isbonded to conductive layer 144 using a suitable attachment or bondingprocess. In one embodiment, the bump material is reflowed by heating thematerial above its melting point to form spherical balls or bumps 148.In some applications, bumps 148 are reflowed a second time to improveelectrical contact to conductive layer 144. The bumps can also becompression bonded to conductive layer 144. Bumps 148 represent one typeof interconnect structure that is formed over conductive layer 144. Theinterconnect structure can also use bond wires, stud bump, micro bump,or other electrical interconnect. Bumps 148 or other interconnectstructures are optional, and in one embodiment, are formed aftersingulation of reconstituted panel 134.

In FIG. 5h , an optional backgrinding tape or support tape 150 isapplied over reconstituted panel 134 and in contact with interconnectstructure 140. In one embodiment, support tape 150 includes a thermallyresistant tape, warpage balancing tape, or other tape. For example,support tape 150 may include a material having high thermal conductivityand high heat resistance. Alternatively, reconstituted panel 134 isplaced in a supporting jig with or without support tape 150.

In FIG. 5i , reconstituted panel 134 undergoes an optional backgrindingoperation with grinder 160 or other suitable mechanical or etchingprocess to reduce a thickness of reconstituted panel 134 and to exposeback surface 88 of components 120-124 coplanar with new back surface 164of encapsulant 136. The backgrinding operation removes a portion ofencapsulant 136 from over PCB units 100 and components 120-124. In oneembodiment, the backgrinding operation removes a portion of components120-124 as well as a portion of encapsulant 136 and leaves new backsurface 162 of components 120-124 coplanar with new back surface 164 ofencapsulant 136. In one embodiment, surface 116 of PCB units 100 remainscovered with encapsulant 136 after backgrinding. In another embodiment,the backgrinding operation removes encapsulant 136 from over backsurface 116 of PCB units 100 to expose conductive layer 106 over PTH108.

FIG. 5j continues from FIG. 5i and shows reconstituted panel 134 afterthe backgrinding operation shown in FIG. 5i . In FIG. 5j , reconstitutedpanel 134 is singulated with saw blade or laser cutting device 166through PCB units 100 and interconnect structure 140 into individualmodules 118.

FIG. 5k continues from FIG. 5h and shows reconstituted panel 134 withoutthe optional backgrinding operation shown in FIG. 5i . In FIG. 5k ,reconstituted panel 134 is singulated with saw blade or laser cuttingdevice 166 through PCB units 100 and interconnect structure 140 intoindividual modules 118.

In FIG. 5l , a shielding layer 170 is formed over encapsulant 136.Shielding layer 170 can be Al, ferrite or carbonyl iron, stainlesssteel, nickel silver, low-carbon steel, silicon-iron steel, foil,conductive resin, and other metals and composites capable of blocking orabsorbing EMI, RFI, harmonic distortion, and other inter-deviceinterference. Shielding layer 170 is patterned and conformally depositedusing an electrolytic plating, electroless plating, sputtering, PVD,CVD, or other suitable metal deposition process. Shielding layer 170 canalso be a non-metal material such as carbon-black or aluminum flake toreduce the effects of EMI and RFI. For non-metal materials, shieldinglayer 170 can be applied by lamination, spraying, or painting. Shieldinglayer 170 encapsulates module 118. Shielding layer 170 substantiallycovers all areas of encapsulant 136 relative to the top of semiconductordie 84 or components 120-124 to provide protection for the enclosedsemiconductor devices against EMI, RFI, or other inter-deviceinterference. The interference can be generated internally or come fromexternal semiconductor devices containing IPDs or RF circuits. Shieldinglayer 170 also substantially covers all areas of encapsulant 136relative to the sides of module 118. Shielding layer 170 is electricallyconnected through RDL 144, conductive layer 104, PTH 108, and optionalconductive layer 106 of PCB unit 100 to an external low-impedance groundpoint.

FIG. 5m shows support tape 150 removed from over interconnect structure140 to form EMI shielded module 172. EMI shielded module 172 includes anLC circuit with EMI shielding. Shielding layer 170 encapsulates EMIshielded module 172. Shielding layer 170 extends completely aroundsemiconductor die 84 or components 120-124. Shielding layer 170substantially covers all areas of encapsulant 136 relative to the top ofsemiconductor die 84 or components 120-124 to provide protection for theenclosed semiconductor devices against EMI, RFI, or other inter-deviceinterference. The interference can be generated internally or come fromexternal semiconductor devices containing IPDs or RF circuits. Shieldinglayer 170 also substantially covers all areas of encapsulant 136relative to the sides of EMI shielded module 172. RDL 144 forms a groundplane. Conductive layer 104, PTH 108, and optional conductive layer 106of PCB units 100 provide an electrical connection between shieldinglayer 170 and RDL 144. PCB units 100 provide a grounding connection. PCBunits 100, RDL 144, and shielding layer 170 surround semiconductor die84 or components 120-124 as part of a faraday cage providing EMI and RFIshielding to EMI shielded module 172. PCB units 100, RDL 144, andshielding layer 170 surround semiconductor die 84 or components 120-124and route EMI, RFI, and other interfering signals from shielding layer170 to an external low-impedance ground point. Accordingly, PCB units100, RDL 144, and shielding layer 170 provide effective EMI and RFIshielding for EMI shielded module 172. PCB units 100 have a height lessthan a height of semiconductor die 84 or components 120-124. PCB unit100 acts as a modular interconnect structure providing connectivity toEMI shielded module 172. In one embodiment, components 120-124 form anLC circuit.

FIGS. 6a-6b illustrate, in relation to FIGS. 5a-5m , an alternativemethod of singulating reconstituted panel 134. FIG. 6 a shows across-sectional view of a portion of reconstituted panel 134. In FIG. 6a, a trench 180 is formed in the front side of reconstituted panel 134with saw blade or laser cutting device 166. Trench 180 cuts fullythrough PCB units 100 and interconnect structure 140. Trench 180 cutspartially through encapsulant 136. Trench 180 stops short of surface 138of encapsulant 136. In one embodiment, trench 180 is formed to a depthof back surface 88 of components 120-124.

In FIG. 6b , reconstituted panel 134 undergoes a backgrinding operationwith grinder 160 or other suitable mechanical or etching process toreduce a thickness of reconstituted panel 134 and to singulate modules118. In one embodiment, the backgrinding operation exposes back surface88 of components 120-124. The backgrinding operation removes a portionof encapsulant 136 from over PCB units 100 and components 120-124leaving new back surface 164 of encapsulant 136. In one embodiment, thebackgrinding operation removes a portion of components 120-124 as wellas a portion of encapsulant 136 and leaves new back surface 162 ofcomponents 120-124 coplanar with new back surface 164 of encapsulant136. In one embodiment, surface 116 of PCB units 100 remains coveredwith encapsulant 136 after backgrinding. In another embodiment, thebackgrinding operation removes encapsulant 136 from over back surface116 of PCB units 100 to expose conductive layer 106 over PTH 108.Singulated module 118 of FIG. 6b is equivalent to singulated module 118of FIG. 5j . Processing of singulated module 118 continues withformation of shielding layer 170 as shown in FIG. 5l and explainedabove.

FIGS. 7a-7h illustrate, in relation to FIGS. 5a-5m , an alternativemethod of making an EMI shielded module with longer PCB units disposedalong each side of the EMI shielded module. In the present embodiment,longer PCB units 190, disposed along the edges of module 192 replacecorner PCB units 100 of module 118. PCB units 190 include base material102, conductive layer 104 and optional conductive layer 106 formed onopposing surfaces of base material 102, and optional PTH 108, as shownin FIG. 3. PCB units 190 are longer than PCB units 100. In oneembodiment, some PCB units 190 are approximately 3 mm in length whileother PCB units 190 are approximately 5 mm in length.

FIG. 7a shows a cross-sectional view of a portion of a carrier ortemporary substrate 130 containing sacrificial base material such assilicon, polymer, beryllium oxide, glass, or other suitable low-cost,rigid material for structural support. An interface layer ordouble-sided tape 132 is formed over carrier 130 as a temporary adhesivebonding film, etch-stop layer, or thermal release layer. Components120-124 or semiconductor die 84 from FIG. 2d and PCB units 190 aremounted to interface layer 132 and over carrier 130 using, for example,a pick and place operation with front surface 114 of PCB units 190 andactive surface 90 of components 120-124 or semiconductor die 84 orientedtoward the carrier. Components 120-124 and PCB units 190 are arranged toform module 192. FIG. 7a shows components 120-124 and PCB units 190mounted to interface layer 132 of carrier 130 as reconstituted panel orreconfigured wafer 194. PCB units 190 have a height less than a heightof components 120-124. PCB unit 190 acts as a modular interconnectstructure providing connectivity to module 192.

FIG. 7a shows an encapsulant or molding compound 136 deposited overreconstituted panel 194 including PCB units 190, components 120-124, andcarrier 130 using a paste printing, compressive molding, transfermolding, liquid encapsulant molding, vacuum lamination, or othersuitable applicator. Encapsulant 136 can be polymer composite material,such as epoxy resin with filler, epoxy acrylate with filler, or polymerwith proper filler. Encapsulant 136 is non-conductive, provides physicalsupport, and environmentally protects the semiconductor device fromexternal elements and contaminants. Encapsulant 136 is deposited betweenPCB units 190 and components 120-124 to cover the side surfaces of PCBunits 190 and components 120-124. In one embodiment, encapsulant 136 isdeposited using film-assisted molding process to leave back surface 88of components 120-124 devoid of the encapsulant.

In FIG. 7b , temporary carrier 130 and optional interface layer 132 areremoved from reconstituted panel 194 by chemical etching, mechanicalpeel-off, CMP, mechanical grinding, thermal bake, laser scanning, or wetstripping. Front surface 114 of PCB units 190 and active surface 90 ofcomponents 120-124 are exposed after carrier 130 and interface layer 132are removed. FIG. 7b shows a plan view of a portion of reconstitutedpanel 194.

In FIG. 7c , a build-up interconnect structure 140 is formed over PCBunits 190, components 120-124, and encapsulant 136. Insulating orpassivation layer 142 is formed over front surface 114 of PCB units 190,active surface 90 of components 120-124, and encapsulant 136 using PVD,CVD, printing, spin coating, spray coating, sintering or thermaloxidation. Insulating layer 142 contains one or more layers of SiO2,Si3N4, SiON, Ta2O5, Al2O3, or other material having similar insulatingand structural properties. A portion of insulating layer 142 is removedby an etching process to expose conductive layer 104 of PCB unit 190 andportions of components 120-124.

An electrically conductive layer 144 is formed over insulating layer142, conductive layer 104 of PCB unit 190, and components 120-124 usinga patterning and metal deposition process such as PVD, CVD, sputtering,electrolytic plating, electroless seed layer deposition, and electrolessplating. Conductive layer 144 includes one or more layers of Al, Cu, Ti,TiW, tin Sn, Ni, Au, Ag, W, or other suitable electrically conductivematerial or combination thereof. Conductive layer 144 operates as an RDLground plane to provide EMI shielding for module 192. In one embodiment,conductive layer 144 operates as an RDL to redistribute electricalconnection from components 120-124 to outside a footprint of module 192.One portion of conductive layer 144 is electrically connected toconductive layer 104 of PCB unit 190, while other portions of conductivelayer 144 are electrically connected to contact pads 92 of components120-124. Still other portions of conductive layer 144 are electricallycommon or electrically isolated depending on the design and function ofthe semiconductor device. Conductive layer 144 electrically connectscomponents 120-124 to conductive layer 104 of PCB units 190.

An insulating or passivation layer 146 is formed over insulating layer142 and conductive layer 144 using PVD, CVD, printing, spin coating,spray coating, sintering or thermal oxidation. Insulating layer 146includes one or more layers of SiO2, Si3N4, SiON, Ta2O5, Al2O3, lowtemperature curable polymer dielectric resist (i.e., cures at less than250° C.), BCB, PBO, or epoxy based photosensitive polymer dielectric, orother material having similar insulating and structural properties. Aportion of insulating layer 146 is removed by LDA or an etching processthrough a patterned photoresist layer to expose portions of conductivelayer 144.

FIG. 7d shows a plan view of a portion of reconstituted panel 194including further detail of conductive layer or RDL ground plane 144.For purposes of illustration, FIG. 7d shows reconstituted panel 194without insulating layers 142 and 146. Conductive layer 144 iselectrically connected to PCB units 190 disposed along each edge of eachmodule 192 through conductive layer 104. Conductive layer 104 is furtherelectrically connected to conductive layer 106 through PTH 108 of PCBunit 190.

In FIG. 7e , an electrically conductive bump material is deposited overmodules 192 and electrically connected to conductive layer 144 using anevaporation, electrolytic plating, electroless plating, ball drop, orscreen printing process. The bump material includes Al, Sn, Ni, Au, Ag,Pb, Bi, Cu, solder, or combinations thereof, with an optional fluxsolution. For example, the bump material can be eutectic Sn/Pb,high-lead solder, or lead-free solder. The bump material is bonded toconductive layer 144 using a suitable attachment or bonding process. Inone embodiment, the bump material is reflowed by heating the materialabove its melting point to form spherical balls or bumps 148. In someapplications, bumps 148 are reflowed a second time to improve electricalcontact to conductive layer 144. The bumps can also be compressionbonded to conductive layer 144. Bumps 148 represent one type ofinterconnect structure that is formed over conductive layer 144. Theinterconnect structure can also use bond wires, stud bump, micro bump,or other electrical interconnect. Bumps 148 or other interconnectstructures are optional, and in one embodiment, are formed aftersingulation of reconstituted panel 134.

Backgrinding tape or support tape 150 is applied over reconstitutedpanel 194 and in contact with interconnect structure 140. In oneembodiment, support tape 150 includes a thermally resistant tape,warpage balancing tape, or other tape. For example, support tape 150 mayinclude a material having high thermal conductivity and high heatresistance. Alternatively, reconstituted panel 194 is placed in asupporting jig with or without support tape 150.

In FIG. 7e , a wide trench 200 is formed in the back side ofreconstituted panel 194 including surface 138 of encapsulant 136 withsaw blade or laser cutting device 166. Saw blade 166 uses a relativelywide blade to make wide trench 200. Wide trench 200 cuts fully throughencapsulant 136. Wide trench 200 cuts partially through PCB units 190through back surface 116. Wide trench 200 cuts completely throughinsulating layer 112 and conductive layer 106. Wide trench 200 cutspartially through base material 102. Wide trench 200 stops short ofconductive layer 104.

In FIG. 7f , reconstituted panel 194 is singulated with saw blade orlaser cutting device 166 through interconnect structure 140 and theremainder of PCB units 190 into individual modules 192. Saw blade 166uses a relatively narrower saw blade than that used to form wide trench200. Saw blade 166 singulates modules 192 from the front side.

In FIG. 7g , a shielding layer 170 is formed over encapsulant 136.Shielding layer 170 can be Al, ferrite or carbonyl iron, stainlesssteel, nickel silver, low-carbon steel, silicon-iron steel, foil,conductive resin, and other metals and composites capable of blocking orabsorbing EMI, RFI, harmonic distortion, and other inter-deviceinterference. Shielding layer 170 is patterned and conformally depositedusing an electrolytic plating, electroless plating, sputtering, PVD,CVD, or other suitable metal deposition process. Shielding layer 170 canalso be a non-metal material such as carbon-black or aluminum flake toreduce the effects of EMI and RFI. For non-metal materials, shieldinglayer 170 can be applied by lamination, spraying, or painting. Shieldinglayer 170 encapsulates module 118. Shielding layer 170 substantiallycovers all areas of encapsulant 136 relative to the top of semiconductordie 84 or components 120-124 to provide protection for the enclosedsemiconductor devices against EMI, RFI, or other inter-deviceinterference. The interference can be generated internally or come fromexternal semiconductor devices containing IPDs or RF circuits. Shieldinglayer 170 also substantially covers all areas of encapsulant 136relative to the sides of module 192. Shielding layer 170 is electricallyconnected through RDL 144, optional conductive layer 106, PTH 108, andconductive layer 104 of PCB unit 190 to an external low-impedance groundpoint. Shielding layer 170 encapsulates module 192.

FIG. 7h shows support tape 150 removed from over interconnect structure140 to form EMI shielded module 210. EMI shielded module 210 includes anLC circuit with EMI shielding. Shielding layer 170 encapsulates EMIshielded module 210. Shielding layer 170 extends completely aroundsemiconductor die 84 or components 120-124. Shielding layer 170substantially covers all areas of encapsulant 136 relative to the top ofsemiconductor die 84 or components 120-124 to provide protection for theenclosed semiconductor devices against EMI, RFI, or other inter-deviceinterference. The interference can be generated internally or come fromexternal semiconductor devices containing IPDs or RF circuits. Shieldinglayer 170 also substantially covers all areas of encapsulant 136relative to the sides of EMI shielded module 210. RDL 144 forms a groundplane. Optional conductive layer 106, PTH 108, and conductive layer 104of PCB units 190 provide an electrical connection between shieldinglayer 170 and RDL 144 as part of an EMI shield. PCB units 190 provide agrounding connection. PCB units 190, RDL 144, and shielding layer 170surround semiconductor die 84 or components 120-124 as part of a faradaycage providing EMI and RFI shielding to EMI shielded module 210. PCBunits 190, RDL 144, and shielding layer 170 surround semiconductor die84 or components 120-124 and route EMI, RFI, and other interferingsignals from shielding layer 170 to an external low-impedance groundpoint. Accordingly, PCB units 190, RDL 144, and shielding layer 170provide effective EMI and RFI shielding for EMI shielded module 210. PCBunits 190 have a height less than a height of components 120-124. PCBunit 190 acts as a modular interconnect structure providing connectivityto EMI shielded module 210. In one embodiment, components 120-124 forman LC circuit.

FIGS. 8a-8f illustrate, in relation to FIGS. 7a-7h , an alternativemethod of making an EMI shielded module with taller PCB units disposedalong each side of the EMI shielded module. In the present embodiment,taller PCB units 220, disposed along the edges of module 222 replace PCBunits 190 of module 192. PCB units 220 include base material 102,conductive layer 104 and optional conductive layer 106 formed onopposing surfaces of base material 102, and optional PTH 108, as shownin FIG. 3. PCB units 220 are longer than PCB units 100, and taller thanPCB units 190. In one embodiment, some PCB units 220 are approximately 3mm in length while other PCB units 220 are approximately 5 mm in length.In one embodiment, PCB units 220 are taller than components 120-124.FIG. 8a shows a cross-sectional view of a portion of reconstituted panel224, similar to reconsitituted wafer 194 from FIG. 7e , but with tallerPCB units 220 disposed along each edge of each module 222. PCB units 220have a height greater than a height of components 120-124. PCB unit 220acts as a modular interconnect structure providing connectivity tomodule 222.

In FIG. 8b , reconstituted panel 224 undergoes an optional backgrindingoperation with grinder 160 or other suitable mechanical or etchingprocess to reduce a thickness of reconstituted panel 224 and to exposeconductive layer 106 of PCB unit 220. The backgrinding operation removesall of encapsulant 136 from over PCB units 220, as well as insulatinglayer 112, exposing conductive layer 106. The backgrinding operationremoves a portion of encapsulant 136 from over components 120-124leaving new back surface 164 of encapsulant 136. In one embodiment, thebackgrinding operation removes a portion of components 120-124 as wellas a portion of encapsulant 136 and leaves new back surface 162 ofcomponents 120-124 coplanar with new back surface 164 of encapsulant136. In another embodiment, back surface 88 of components 120-124remains covered with encapsulant 136 after backgrinding.

FIG. 8c shows reconstituted panel 224 after the backgrinding operationshown in FIG. 8b . In FIG. 8c , a layer of thermally conductive material226 is applied over conductive layer 106 and surface 164 of encapsulant136. Thermally conductive layer 226 provides superior thermalconductivity and adhesion to surface 164 of encapsulant 136. Thermallyconductive layer 226 can be Ti, Invar alloy, stainless steel, Chromium(Cr)/Cu alloy, Ni, or thermal conductive paste.

A shielding lid 228 is formed over thermally conductive layer 226.Shielding lid 228 can be Cu, Al, ferrite or carbonyl iron, stainlesssteel, nickel silver, low-carbon steel, silicon-iron steel, foil,conductive composite, and other metals and composites capable ofblocking or absorbing EMI, RFI, harmonic distortion, and otherinter-device interference. Shielding lid 228 is patterned andconformally deposited using an electrolytic plating, electrolessplating, sputtering, PVD, CVD, or other suitable metal depositionprocess. In one embodiment, shielding lid 228 includes an outer layerwith improved anti-corrosive properties. Shielding lid 228 can also be anon-metal material such as carbon-black or aluminum flake to reduce theeffects of EMI and RFI. For non-metal materials, shielding lid 228 canbe applied by lamination, spraying, or painting. Shielding lid 228 iselectrically connected through RDL 144, optional conductive layer 106,PTH 108, and conductive layer 104 of PCB unit 220 to an externallow-impedance ground point. In one embodiment, shielding lid 228 ispre-formed and attached, via thermally conductive layer 226, toreconstituted panel 224. Shielding lid 228 substantially covers allareas of encapsulant 136 relative to the top of semiconductor die 84 orcomponents 120-124 to provide protection for the enclosed semiconductordevices against EMI, RFI, or other inter-device interference. PCB units220 provides protection for the enclosed semiconductor devices againstEMI, RFI, or other inter-device interference relative to the sides ofmodule 222. The interference can be generated internally or come fromexternal semiconductor devices containing IPDs or RF circuits. In oneembodiment, thermally conductive layer 226 is snap cured.

In FIG. 8d , reconstituted panel 224 is singulated with saw blade orlaser cutting device 166 through interconnect structure 140, PCB units220, thermally conductive layer 226, and shielding lid 228 intoindividual modules 222. Saw blade 166 singulates modules 222 from thefront side.

FIG. 8e shows support tape 150 removed from over interconnect structure140 to form EMI shielded module 230. EMI shielded module 230 includes anLC circuit with EMI shielding. Shielding lid 228 forms a conductive lidover EMI shielded module 230. RDL 144 forms a ground plane. Conductivelayers 104 and 106, and PTH 108 of PCB units 220 provide an electricalconnection between shielding lid 228, thermally conductive layer 226,and RDL 144. PCB units 220 provide a grounding connection. PCB units 220act as modular interconnect structures providing connectivity to EMIshielded module 230. PCB units 220, RDL 144, thermally conductive layer226, and shielding lid 228 extend completely around semiconductor die 84or components 120-124. Shielding lid 228 substantially covers all areasof encapsulant 136 relative to the top of semiconductor die 84 orcomponents 120-124 to provide protection for the enclosed semiconductordevices against EMI, RFI, or other inter-device interference. PCB units220 provides protection for the enclosed semiconductor devices againstEMI, RFI, or other inter-device interference relative to the sides ofEMI shielded module 230. The interference can be generated internally orcome from external semiconductor devices containing IPDs or RF circuits.PCB units 220, RDL 144, thermally conductive layer 226, and shieldinglid 228 surround semiconductor die 84 or components 120-124 as part of afaraday cage providing EMI and RFI shielding to EMI shielded module 230.PCB units 220, RDL 144, thermally conductive layer 226, and shieldinglid 228 surround semiconductor die 84 or components 120-124 and routeEMI, RFI, and other interfering signals from PCB units 220, RDL 144,thermally conductive layer 226, and shielding lid 228 to an externallow-impedance ground point. Accordingly, PCB units 220, RDL 144,thermally conductive layer 226, and shielding lid 228 provide effectiveEMI and RFI shielding for EMI shielded module 230. In one embodiment,components 120-124 form an LC circuit. A height of PCB units 220 isgreater than a height of components 120-124.

FIG. 8f continues from FIG. 8b with the backgrinding operation removinga portion of components 120-124 as well as a portion of encapsulant 136and leaving new back surface 162 of components 120-124 coplanar with newback surface 164 of encapsulant 136. In one embodiment, new back surface162 of components 120-124 and new back surface 164 of encapsulant 136are coplanar with conductive layer 106 of PCB unit 220. FIG. 8f showsthermally conductive layer 226 applied over conductive layer 106,surface 162 of components 120-124, and surface 164 of encapsulant 136. Ashielding lid 228 is formed over thermally conductive layer 226.Shielding lid 228 is electrically connected through RDL 144, conductivelayer 106, PTH 108, and conductive layer 104 of PCB unit 220 to anexternal low-impedance ground point.

FIG. 8f shows support tape 150 removed from over interconnect structure140 to form EMI shielded module 232. EMI shielded module 232 includes anLC circuit with EMI shielding. Shielding lid 228 forms a conductive lidover EMI shielded module 232. RDL 144 forms a ground plane. PCB units220 provide an electrical connection between shielding lid 228,thermally conductive layer 226, and RDL 144 through conductive layers104 and 106, and PTH 108. Shielding lid 228 substantially covers allareas of encapsulant 136 relative to the top of semiconductor die 84 orcomponents 120-124 to provide protection for the enclosed semiconductordevices against EMI, RFI, or other inter-device interference. PCB units220, RDL 144, thermally conductive layer 226, and shielding lid 228surround semiconductor die 84 or components 120-124 as part of a faradaycage providing EMI and RFI shielding to EMI shielded module 232. Aheight of PCB units 220 is equal to a height of components 120-124.

FIGS. 9a-9h illustrate, in relation to FIGS. 5a-5m , an alternativemethod of making an EMI shielded module with an embedded conductiveshielding cage including mesh holes. FIG. 9a shows a cross-sectionalview of a portion of a carrier or temporary substrate 130 containingsacrificial base material such as silicon, polymer, beryllium oxide,glass, or other suitable low-cost, rigid material for structuralsupport. An interface layer or double-sided tape 132 is formed overcarrier 130 as a temporary adhesive bonding film, etch-stop layer, orthermal release layer. Components 120-124 or semiconductor die 84 fromFIG. 2d are mounted to interface layer 132 and over carrier 130 using,for example, a pick and place operation with active surface 90 ofcomponents 120-124 or semiconductor die 84 oriented toward the carrier.Components 120-124 are arranged to form module 242. FIG. 9a showscomponents 120-124 mounted to interface layer 132 of carrier 130 asreconstituted panel or reconfigured wafer 240.

In FIG. 9b , a shielding cage 244 is disposed over module 242 andcarrier 130 using, for example, a pick and place operation. Shieldingcage 244 can be Al, ferrite or carbonyl iron, stainless steel, nickelsilver, low-carbon steel, silicon-iron steel, foil, conductive resin,and other metals and composites capable of blocking or absorbing EMI,RFI, harmonic distortion, and other inter-device interference. Shieldingcage 244 is patterned and conformally deposited using an electrolyticplating, electroless plating, sputtering, PVD, CVD, or other suitablemetal deposition process. Shielding cage 244 can also be a non-metalmaterial such as carbon-black or aluminum flake to reduce the effects ofEMI and RFI. For non-metal materials, shielding cage 244 can be appliedby lamination, spraying, or painting. Shielding cage 244 includes meshholes 246. Mesh holes 246 are sized and positioned in shielding cage 244to ensure effective EMI shielding. Mesh holes 246 are sized andpositioned in shielding cage 244 to ensure efficient flow ofencapsulation material. In one embodiment, mesh holes 246 are positionedin shielding cage 244 to maximize EMI shielding. The thickness ofshielding cage 244 is designed to provide sufficient EMI shieldingcapability. The size of feet 248 of shielding cage 244 is designed toprovide sufficient EMI shielding capability. The thickness of shieldingcage 244 is also designed to provide sufficient adhesion to interfacelayer 132. The size of feet 248 of shielding cage 244 is also designedto provide sufficient adhesion to interface layer 132. Shielding cage244 substantially covers all areas of module 242 relative to the top ofsemiconductor die 84 and components 120-124 to provide protection forthe enclosed semiconductor devices against EMI, RFI, or otherinter-device interference. The interference can be generated internallyor come from external semiconductor devices containing IPDs or RFcircuits. Shielding cage 244 can also provide inter-device interferenceprotection relative to the sides of module 242.

In FIG. 9c , an encapsulant or molding compound 136 deposited overreconstituted panel 240 including shielding cage 244, components120-124, and carrier 130 using a paste printing, compressive molding,transfer molding, liquid encapsulant molding, vacuum lamination, orother suitable applicator. Encapsulant 136 can be polymer compositematerial, such as epoxy resin with filler, epoxy acrylate with filler,or polymer with proper filler. Encapsulant 136 is non-conductive,provides physical support, and environmentally protects thesemiconductor device from external elements and contaminants.Encapsulant 136 is deposited between shielding cage 244 and components120-124 to cover the side surfaces of shielding cage 244 and components120-124. Encapsulant 136 flows through mesh holes 246 of shielding cage244 to fully encapsulate shielding cage 244, components 120-124, andcarrier 130. In one embodiment, encapsulant 136 is deposited usingfilm-assisted molding process to leave a backside of shielding cage 244devoid of the encapsulant.

In FIG. 9d , temporary carrier 130 and optional interface layer 132 areremoved from reconstituted panel 240 by chemical etching, mechanicalpeel-off, CMP, mechanical grinding, thermal bake, laser scanning, or wetstripping. Feet 248 of shielding cage 244 and active surface 90 ofcomponents 120-124 are exposed after carrier 130 and interface layer 132are removed. In FIG. 9d , a conductive adhesive 250 is applied toexposed feet 248 of shielding cage 244. Conductive adhesive 250 can bethermal epoxy, thermal epoxy resin, thermal conductive paste, aluminumoxide, zinc oxide, boron nitride, pulverized silver, or thermal grease.FIG. 9d shows a build-up interconnect structure 140 formed overconductive adhesive 250, components 120-124, and encapsulant 136.Insulating or passivation layer 142 is formed over conductive adhesive250, components 120-124, and encapsulant 136 using PVD, CVD, printing,spin coating, spray coating, sintering or thermal oxidation. Insulatinglayer 142 contains one or more layers of SiO2, Si3N4, SiON, Ta2O5,Al2O3, or other material having similar insulating and structuralproperties. A portion of insulating layer 142 is removed by an etchingprocess to expose conductive adhesive 250 and portions of components120-124.

An electrically conductive layer 144 is formed over insulating layer142, conductive adhesive 250, and components 120-124 using a patterningand metal deposition process such as PVD, CVD, sputtering, electrolyticplating, electroless seed layer deposition, and electroless plating.Conductive layer 144 includes one or more layers of Al, Cu, Ti, TiW, tinSn, Ni, Au, Ag, W, or other suitable electrically conductive material orcombination thereof. Conductive layer 144 operates as an RDL groundplane to provide EMI shielding for module 242. In one embodiment,conductive layer 144 operates as an RDL to redistribute electricalconnection from components 120-124 to outside a footprint of module 242.One portion of conductive layer 144 is electrically connected to feet248 of shielding cage 244, while other portions of conductive layer 144are electrically connected to contact pads 92 of components 120-124.Still other portions of conductive layer 144 are electrically common orelectrically isolated depending on the design and function of thesemiconductor device. Conductive layer 144 electrically connectscomponents 120-124 to feet 248 of shielding cage 244.

An insulating or passivation layer 146 is formed over insulating layer142 and conductive layer 144 using PVD, CVD, printing, spin coating,spray coating, sintering or thermal oxidation. Insulating layer 146includes one or more layers of SiO2, Si3N4, SiON, Ta2O5, Al2O3, lowtemperature curable polymer dielectric resist (i.e., cures at less than250° C.), BCB, PBO, or epoxy based photosensitive polymer dielectric, orother material having similar insulating and structural properties. Aportion of insulating layer 146 is removed by LDA or an etching processthrough a patterned photoresist layer to expose portions of conductivelayer 144. Shielding cage 244 is electrically connected through RDL 144to an external low-impedance ground point.

In FIG. 9e , an electrically conductive bump material is deposited overmodule 242 and electrically connected to conductive layer 144 using anevaporation, electrolytic plating, electroless plating, ball drop, orscreen printing process. The bump material includes Al, Sn, Ni, Au, Ag,Pb, Bi, Cu, solder, or combinations thereof, with an optional fluxsolution. For example, the bump material can be eutectic Sn/Pb,high-lead solder, or lead-free solder. The bump material is bonded toconductive layer 144 using a suitable attachment or bonding process. Inone embodiment, the bump material is reflowed by heating the materialabove its melting point to form spherical balls or bumps 148. In someapplications, bumps 148 are reflowed a second time to improve electricalcontact to conductive layer 144. The bumps can also be compressionbonded to conductive layer 144. Bumps 148 represent one type ofinterconnect structure that is formed over conductive layer 144. Theinterconnect structure can also use bond wires, stud bump, micro bump,or other electrical interconnect. Bumps 148 or other interconnectstructures are optional, and in one embodiment, are formed aftersingulation of reconstituted panel 240.

FIG. 9e shows an optional backgrinding tape or support tape 150 appliedover reconstituted panel 240 and in contact with interconnect structure140. In one embodiment, support tape 150 includes a thermally resistanttape, warpage balancing tape, or other tape. For example, support tape150 may include a material having high thermal conductivity and highheat resistance. Alternatively, reconstituted panel 240 is placed in asupporting jig with or without support tape 150. In one embodiment,reconstituted panel 240 undergoes an optional backgrinding operationwith grinder 160 or other suitable mechanical or etching process toreduce a thickness of encapsulant 136 and reconstituted panel 240. Inanother embodiment, grinder 160 removes encapsulant 136 exposing abackside of shielding cage 244. In FIG. 9f , reconstituted panel 240 issingulated with saw blade or laser cutting device 166 throughencapsulant 136 and interconnect structure 140 into individual modules242.

In FIG. 9g , support tape 150 is removed from over interconnectstructure 140 to form EMI shielded module 260. EMI shielded module 260includes an LC circuit with EMI shielding. Shielding cage 244 forms aconductive cage surrounding EMI shielded module 260. Shielding cage 244extends completely around semiconductor die 84 or components 120-124.Shielding cage 244 substantially covers all areas of EMI shielded module260 relative to the top of semiconductor die 84 and components 120-124to provide protection for the enclosed semiconductor devices againstEMI, RFI, or other inter-device interference. The interference can begenerated internally or come from external semiconductor devicescontaining IPDs or RF circuits. Shielding cage 244 can also provideinter-device interference protection relative to the sides of EMIshielded module 260. RDL 144 forms a ground plane. Conductive adhesive250 provides an electrical connection between shielding cage 244 and RDL144. Conductive adhesive 250 provides a grounding connection. Shieldingcage 244, conductive adhesive 250, and RDL 144 surround semiconductordie 84 or components 120-124 as part of a faraday cage providing EMI andRFI shielding to EMI shielded module 260. Shielding cage 244, conductiveadhesive 250, and RDL 144 surround semiconductor die 84 or components120-124 and route EMI, RFI, and other interfering signals from shieldingcage 244 to an external low-impedance ground point. Accordingly,shielding cage 244, conductive adhesive 250, and RDL 144 provideeffective EMI and RFI shielding for EMI shielded module 260. In oneembodiment, components 120-124 form an LC circuit.

FIG. 9h shows EMI shielded module 262, similar to EMI shielded module260. A backside of shielding cage 244 is exposed from encapsulant 136 inEMI shielded module 262. In one embodiment, encapsulant 136 is depositedusing film-assisted molding process, leaving a backside of shieldingcage 244 devoid of encapsulant. In another embodiment, grinder 160removes encapsulant 136 exposing a backside of shielding cage 244. EMIshielded module 262 includes an LC circuit with EMI shielding. Shieldingcage 244 forms a conductive cage surrounding EMI shielded module 262.Shielding cage 244 extends completely around semiconductor die 84 orcomponents 120-124. Shielding cage 244 substantially covers all areas ofEMI shielded module 262 relative to the top of semiconductor die 84 andcomponents 120-124 to provide protection for the enclosed semiconductordevices against EMI, RFI, or other inter-device interference. Theinterference can be generated internally or come from externalsemiconductor devices containing IPDs or RF circuits. Shielding cage 244can also provide inter-device interference protection relative to thesides of EMI shielded module 262. RDL 144 forms a ground plane.Conductive adhesive 250 provides an electrical connection betweenshielding cage 244 and RDL 144. Conductive adhesive 250 provides agrounding connection. Shielding cage 244, conductive adhesive 250, andRDL 144 surround semiconductor die 84 or components 120-124 as part of afaraday cage providing EMI and RFI shielding to EMI shielded module 262.Shielding cage 244, conductive adhesive 250, and RDL 144 surroundsemiconductor die 84 or components 120-124 and route EMI, RFI, and otherinterfering signals from shielding cage 244 to an external low-impedanceground point. Accordingly, shielding cage 244, conductive adhesive 250,and RDL 144 provide effective EMI and RFI shielding for EMI shieldedmodule 262. In one embodiment, components 120-124 form an LC circuit.

FIGS. 10a-10b illustrate, in relation to FIGS. 9a-9f , alternative EMIshielded modules with the shielding cages directly connected to theRDLs. FIG. 10a shows EMI shielded module 270, similar to EMI shieldedmodule 260, but without conductive adhesive 250. In EMI shielded module270, shielding cage 244 is directly connected, physically andelectrically, to RDL 144. EMI shielded module 270 includes an LC circuitwith EMI shielding. Shielding cage 244 forms a conductive cagesurrounding EMI shielded module 270. Shielding cage 244 extendscompletely around semiconductor die 84 or components 120-124. Shieldingcage 244 substantially covers all areas of EMI shielded module 270relative to the top of semiconductor die 84 and components 120-124 toprovide protection for the enclosed semiconductor devices against EMI,RFI, or other inter-device interference. The interference can begenerated internally or come from external semiconductor devicescontaining IPDs or RF circuits. Shielding cage 244 can also provideinter-device interference protection relative to the sides of EMIshielded module 270. RDL 144 forms a ground plane. Feet 248 of shieldingcage 244 directly contact RDL 144. Shielding cage 244 and RDL 144surround semiconductor die 84 or components 120-124 as part of a faradaycage providing EMI and RFI shielding to EMI shielded module 270.Shielding cage 244 and RDL 144 surround semiconductor die 84 orcomponents 120-124 and route EMI, RFI, and other interfering signalsfrom shielding cage 244 to an external low-impedance ground point.Accordingly, shielding cage 244 and RDL 144 provide effective EMI andRFI shielding for EMI shielded module 270. In one embodiment, components120-124 form an LC circuit.

FIG. 10b shows EMI shielded module 272, similar to EMI shielded module262, but without conductive adhesive 250. In EMI shielded module 272,shielding cage 244 is directly connected, physically and electrically,to RDL 144. A backside of shielding cage 244 is exposed from encapsulant136 in EMI shielded module 272. In one embodiment, encapsulant 136 isdeposited using film-assisted molding process, leaving a backside ofshielding cage 244 devoid of encapsulant. In another embodiment, grinder160 removes encapsulant 136 exposing a backside of shielding cage 244.Shielding cage 244 and RDL 144 surround semiconductor die 84 orcomponents 120-124 as part of a faraday cage providing EMI and RFIshielding to EMI shielded module 272.

FIGS. 11a-11b illustrate, in relation to FIGS. 10a-10b , alternative EMIshielded modules including a thermally enhanced adhesive disposedbetween the components and the shielding cage. FIG. 11a shows EMIshielded module 274, similar to EMI shielded module 270, but with athermal interface material disposed between shielding cage 244 andcomponents 120-124. In FIG. 11a , thermal interface material 276 isapplied over back surface 88 of components 120-124 prior to placingshielding cage 244 over the components. Thermal interface material 276is typically a composite material including a filler disposed in a resinadhesive. Thermal interface material 276 includes a low Young's modulus.Thermal interface material 276 can include thermal epoxy, thermal epoxyresin, thermal conductive paste, aluminum oxide, zinc oxide, boronnitride, pulverized silver, or thermal grease with organic filler,silica filler, or polymer filler. Thermal interface material 276improves thermal conductivity between the components 120-124 and theshielding cage 244. Thermal interface material 276 reduces shifting ofshielding cage 244 during encapsulation. In EMI shielded module 274,shielding cage 244 is directly connected, physically and electrically,to RDL 144. EMI shielded module 274 includes an LC circuit with EMIshielding. Shielding cage 244 forms a conductive cage surrounding EMIshielded module 274. Shielding cage 244 extends completely aroundsemiconductor die 84 or components 120-124. Shielding cage 244substantially covers all areas of EMI shielded module 274 relative tothe top of semiconductor die 84 and components 120-124 to provideprotection for the enclosed semiconductor devices against EMI, RFI, orother inter-device interference. The interference can be generatedinternally or come from external semiconductor devices containing IPDsor RF circuits. Shielding cage 244 can also provide inter-deviceinterference protection relative to the sides of EMI shielded module274. RDL 144 forms a ground plane. Feet 248 of shielding cage 244directly contact RDL 144. Shielding cage 244 and RDL 144 surroundsemiconductor die 84 or components 120-124 as part of a faraday cageproviding EMI and RFI shielding to EMI shielded module 274. Shieldingcage 244 and RDL 144 surround semiconductor die 84 or components 120-124and route EMI, RFI, and other interfering signals from shielding cage244 to an external low-impedance ground point. Accordingly, shieldingcage 244 and RDL 144 provide effective EMI and RFI shielding for EMIshielded module 274. In one embodiment, components 120-124 form an LCcircuit.

FIG. 11b shows EMI shielded module 278, similar to EMI shielded module272, but with a thermally enhanced adhesive disposed between theshielding cage and the components. In FIG. 11b , a thermal interfacematerial 276 is applied over back surface 88 of components 120-124 priorto placing shielding cage 244 over the components. Thermal interfacematerial 276 improves thermal conductivity between the components120-124 and the shielding cage 244. Thermal interface material 276reduces shifting of shielding cage 244 during encapsulation. In EMIshielded module 278, shielding cage 244 is directly connected,physically and electrically, to RDL 144. A backside of shielding cage244 is exposed from encapsulant 136 in EMI shielded module 278. In oneembodiment, encapsulant 136 is deposited using film-assisted moldingprocess, leaving a backside of shielding cage 244 devoid of encapsulant.In another embodiment, grinder 160 removes encapsulant 136 exposing abackside of shielding cage 244. Shielding cage 244 and RDL 144 surroundsemiconductor die 84 or components 120-124 as part of a faraday cageproviding EMI and RFI shielding to EMI shielded module 278.

FIGS. 12a-12j illustrate, in relation to FIGS. 5a-5m , a method ofmaking an EMI shielded module without PCB units. FIG. 12a shows across-sectional view of a portion of reconstituted panel 280, similar toreconstituted panel 134 from FIG. 5c , but without PCB units 100. InFIG. 12a , active surfaces 90 of components 120-124 are exposed aftercarrier 130 and interface layer 132 are removed. Trenches 282 are formedin encapsulant 136 at the corners of each module 284. Trenches 282 areformed by a laser or cutting tool 166 at desired locations inencapsulant 136. In one embodiment, trenches 282 in encapsulant 136 areformed in two concentric circles located at each corner of each module284.

FIG. 12b shows a plan view of a portion of reconstituted panel 280,similar to reconsitituted wafer 134 from FIG. 5d , but with trenches 282rather than PCB units 100 at the corners of modules 118. FIG. 12c showsa cross-sectional view of a portion of reconsitituted wafer 280including trenches 282 across reference line 12 c. FIG. 12d shows across-sectional view of a portion of reconsitituted wafer 280 includingtrenches 282 across reference line 12 d.

In FIG. 12e , a build-up interconnect structure 140 is formed overtrenches 282, components 120-124, and encapsulant 136. Insulating orpassivation layer 142 is formed over trenches 282, components 120-124,and encapsulant 136 using PVD, CVD, printing, spin coating, spraycoating, sintering or thermal oxidation. Insulating layer 142 containsone or more layers of SiO2, Si3N4, SiON, Ta2O5, Al2O3, or other materialhaving similar insulating and structural properties. A portion ofinsulating layer 142 is removed by an etching process to exposeencapsulant 136 in trenches 282 and components 120-124.

An electrically conductive layer 144 is formed over insulating layer142, trenches 282, and components 120-124 using a patterning and metaldeposition process such as PVD, CVD, sputtering, electrolytic plating,electroless seed layer deposition, and electroless plating. Conductivelayer 144 includes one or more layers of Al, Cu, Ti, TiW, tin Sn, Ni,Au, Ag, W, or other suitable electrically conductive material orcombination thereof. Conductive layer 144 operates as an RDL groundplane to provide EMI shielding for module 284. In one embodiment,conductive layer 144 operates as an RDL to redistribute electricalconnection from components 120-124 to outside a footprint of module 284.A portion of RDL 144 fills in trenches 282. Portions of conductive layer144 are electrically common or electrically isolated depending on thedesign and function of the semiconductor device. Conductive layer 144provides external connectivity to components 120-124.

An insulating or passivation layer 146 is formed over insulating layer142 and conductive layer 144 using PVD, CVD, printing, spin coating,spray coating, sintering or thermal oxidation. Insulating layer 146includes one or more layers of SiO2, Si3N4, SiON, Ta2O5, Al2O3, lowtemperature curable polymer dielectric resist (i.e., cures at less than250° C.), BCB, PBO, or epoxy based photosensitive polymer dielectric, orother material having similar insulating and structural properties. Aportion of insulating layer 146 is removed by LDA or an etching processthrough a patterned photoresist layer to expose portions of conductivelayer 144.

FIG. 12f , shows a plan view of a portion of reconstituted panel 280including further detail of conductive layer or RDL ground plane 144.For purposes of illustration, FIG. 12d shows reconstituted panel 280without insulating layers 142 and 146. Conductive layer 144 is disposedin trenches 282 at each corner of each module 284. Conductive layer 144fills trenches 282. Portions of conductive layer 144 are electricallyconnected to other portions of conductive layer 144 disposed in trenches282.

In FIG. 12g , an electrically conductive bump material is deposited overmodules 284 and electrically connected to conductive layer 144 using anevaporation, electrolytic plating, electroless plating, ball drop, orscreen printing process. The bump material includes Al, Sn, Ni, Au, Ag,Pb, Bi, Cu, solder, or combinations thereof, with an optional fluxsolution. For example, the bump material can be eutectic Sn/Pb,high-lead solder, or lead-free solder. The bump material is bonded toconductive layer 144 using a suitable attachment or bonding process. Inone embodiment, the bump material is reflowed by heating the materialabove its melting point to form spherical balls or bumps 148. In someapplications, bumps 148 are reflowed a second time to improve electricalcontact to conductive layer 144. The bumps can also be compressionbonded to conductive layer 144. Bumps 148 represent one type ofinterconnect structure that is formed over conductive layer 144. Theinterconnect structure can also use bond wires, stud bump, micro bump,or other electrical interconnect. Bumps 148 or other interconnectstructures are optional, and in one embodiment, are formed aftersingulation of reconstituted panel 280.

Backgrinding tape or support tape 150 is applied over reconstitutedpanel 280 and in contact with interconnect structure 140. In oneembodiment, support tape 150 includes a thermally resistant tape,warpage balancing tape, or other tape. For example, support tape 150 mayinclude a material having high thermal conductivity and high heatresistance. Alternatively, reconstituted panel 280 is placed in asupporting jig with or without support tape 150.

In FIG. 12g , reconstituted panel 280 is singulated with saw blade orlaser cutting device 166 through interconnect structure 140 and trench282 into individual modules 284. In one embodiment, saw blade 166singulates modules 284 from the front side.

In FIG. 12h , a shielding layer 170 is formed over encapsulant 136.Shielding layer 170 can be Al, ferrite or carbonyl iron, stainlesssteel, nickel silver, low-carbon steel, silicon-iron steel, foil,conductive resin, and other metals and composites capable of blocking orabsorbing EMI, RFI, harmonic distortion, and other inter-deviceinterference. Shielding layer 170 is patterned and conformally depositedusing an electrolytic plating, electroless plating, sputtering, PVD,CVD, or other suitable metal deposition process. Shielding layer 170 canalso be a non-metal material such as carbon-black or aluminum flake toreduce the effects of EMI and RFI. For non-metal materials, shieldinglayer 170 can be applied by lamination, spraying, or painting. Shieldinglayer 170 is electrically connected through RDL 144 by portions ofconductive layer 144 disposed in trenches 282 to an externallow-impedance ground point. Shielding layer 170 encapsulates module 284.Shielding layer 170 substantially covers all areas of encapsulant 136relative to the top of semiconductor die 84 or components 120-124 toprovide protection for the enclosed semiconductor devices against EMI,RFI, or other inter-device interference. The interference can begenerated internally or come from external semiconductor devicescontaining IPDs or RF circuits. Shielding layer 170 also substantiallycovers all areas of encapsulant 136 relative to the sides of module 284.

FIG. 12i shows support tape 150 removed from over interconnect structure140 to form EMI shielded module 286. EMI shielded module 286 includes anLC circuit with EMI shielding. Shielding layer 170 encapsulates EMIshielded module 286. Shielding layer 170 extends completely aroundsemiconductor die 84 or components 120-124. Shielding layer 170substantially covers all areas of encapsulant 136 relative to the top ofsemiconductor die 84 or components 120-124 to provide protection for theenclosed semiconductor devices against EMI, RFI, or other inter-deviceinterference. The interference can be generated internally or come fromexternal semiconductor devices containing IPDs or RF circuits. Shieldinglayer 170 also substantially covers all areas of encapsulant 136relative to the sides of EMI shielded module 286. A portion of RDL 144forms a ground plane. Another portion of RDL 144 in trench 282 providesan electrical connection between shielding layer 170 and RDL 144 as partof an EMI shield. RDL 144 provides a grounding connection. Shieldinglayer 170 and RDL 144 surround semiconductor die 84 or components120-124 as part of a faraday cage providing EMI and RFI shielding to EMIshielded module 286. Shielding layer 170 and RDL 144 surroundsemiconductor die 84 or components 120-124 and route EMI, RFI, and otherinterfering signals from shielding layer 170 to an externallow-impedance ground point. Accordingly, shielding layer 170 and RDL 144provide effective EMI and RFI shielding for EMI shielded module 286. Inone embodiment, components 120-124 form an LC circuit.

FIG. 12j shows EMI shielded module 288 with shielding layer 170deposited directly on back surfaces 88 of components 120-124. Backsurfaces 88 of components 120-124 are exposed from encapsulant 136 inEMI shielded module 278 prior to depositing shielding layer 170. In oneembodiment, encapsulant 136 is deposited using film-assisted moldingprocess, leaving back surfaces 88 of components 120-124 devoid ofencapsulant. In another embodiment, grinder 160 removes encapsulant 136exposing back surfaces 88 of components 120-124. Shielding layer 170 andRDL 144 surround semiconductor die 84 or components 120-124 as part of afaraday cage providing EMI and RFI shielding to EMI shielded module 288.

FIGS. 13a-13f illustrate, in relation to FIGS. 12a-12j , an alternativemethod of making an EMI shielded module without trenches formed in theencapsulant. FIG. 13a shows a cross-sectional view of a portion ofreconstituted panel 290, similar to reconstituted panel 280 from FIG.12a , but without trenches. An encapsulant or molding compound 136deposited over reconstituted panel 290 including components 120-124,using a paste printing, compressive molding, transfer molding, liquidencapsulant molding, vacuum lamination, or other suitable applicator. Inone embodiment, encapsulant 136 is deposited using film-assisted moldingprocess. Encapsulant 136 can be polymer composite material, such asepoxy resin with filler, epoxy acrylate with filler, or polymer withproper filler. Encapsulant 136 is non-conductive, provides physicalsupport, and environmentally protects the semiconductor device fromexternal elements and contaminants. In FIG. 13a , active surfaces 90 ofcomponents 120-124 are exposed after carrier 130 and interface layer 132are removed. In one embodiment, an electrically conductive layer 294 isformed over encapsulant 136 in saw streets 126 using a patterning andmetal deposition process such as PVD, CVD, sputtering, electrolyticplating, electroless seed layer deposition, and electroless plating.Conductive layer 294 includes one or more layers of Al, Cu, Ti, TiW, tinSn, Ni, Au, Ag, W, or other suitable electrically conductive material orcombination thereof. Conductive layer 294 operates as RDL side teeth294. RDL side teeth 294 are formed over encapsulant 136, across sawstreets 126 of reconstituted panel 290.

A build-up interconnect structure 140 is formed over components 120-124,RDL side teeth 294, and encapsulant 136. Insulating or passivation layer142 is formed over a surface of components 120-124 and encapsulant 136using PVD, CVD, printing, spin coating, spray coating, sintering orthermal oxidation. Insulating layer 142 contains one or more layers ofSiO2, Si3N4, SiON, Ta2O5, Al2O3, or other material having similarinsulating and structural properties. A portion of insulating layer 142is removed by an etching process to expose portions of encapsulant 136in saw streets 126 and components 120-124.

An electrically conductive layer 144 is formed over insulating layer142, portions of encapsulant 136 in saw streets 126, and of components120-124 using a patterning and metal deposition process such as PVD,CVD, sputtering, electrolytic plating, electroless seed layerdeposition, and electroless plating. Conductive layer 144 includes oneor more layers of Al, Cu, Ti, TiW, tin Sn, Ni, Au, Ag, W, or othersuitable electrically conductive material or combination thereof.Conductive layer 144 operates as an RDL ground plane to provide EMIshielding for module 284. In one embodiment, conductive layer 144operates as an RDL to redistribute electrical connection from components120-124 to outside a footprint of module 284. In one embodiment,conductive layer 144 forms both RDL 144 and RDL side teeth 294. Oneportion of conductive layer 144 is electrically connected to components120-124. Other portions of conductive layer 144 are electrically commonor electrically isolated depending on the design and function of thesemiconductor device. Conductive layer 144 electrically connectscomponents 120-124 to RDL side teeth 294.

An insulating or passivation layer 146 is formed over insulating layer142 and conductive layer 144 using PVD, CVD, printing, spin coating,spray coating, sintering or thermal oxidation. Insulating layer 146includes one or more layers of SiO2, Si3N4, SiON, Ta2O5, Al2O3, lowtemperature curable polymer dielectric resist (i.e., cures at less than250° C.), BCB, PBO, or epoxy based photosensitive polymer dielectric, orother material having similar insulating and structural properties. Aportion of insulating layer 146 is removed by LDA or an etching processthrough a patterned photoresist layer to expose portions of conductivelayer 144, including RDL side teeth 294.

FIG. 13b shows a plan view of a portion of reconstituted panel 290 withRDL side teeth 294. For purposes of illustration, FIG. 13b showsreconstituted panel 290 without insulating layers 142 and 146. In oneembodiment, RDL side teeth 294 are formed as part of conductive layer144. RDL side teeth 294 are formed over encapsulant 136, across sawstreets 126 of reconstituted panel 290.

In FIG. 13c , an electrically conductive bump material is deposited overmodules 292 and electrically connected to conductive layer 144 using anevaporation, electrolytic plating, electroless plating, ball drop, orscreen printing process. The bump material includes Al, Sn, Ni, Au, Ag,Pb, Bi, Cu, solder, or combinations thereof, with an optional fluxsolution. For example, the bump material can be eutectic Sn/Pb,high-lead solder, or lead-free solder. The bump material is bonded toconductive layer 144 using a suitable attachment or bonding process. Inone embodiment, the bump material is reflowed by heating the materialabove its melting point to form spherical balls or bumps 148. In someapplications, bumps 148 are reflowed a second time to improve electricalcontact to conductive layer 144. The bumps can also be compressionbonded to conductive layer 144. Bumps 148 represent one type ofinterconnect structure that is formed over conductive layer 144. Theinterconnect structure can also use bond wires, stud bump, micro bump,or other electrical interconnect. Bumps 148 or other interconnectstructures are optional, and in one embodiment, are formed aftersingulation of reconstituted panel 290.

Backgrinding tape or support tape 150 is applied over reconstitutedpanel 290 and in contact with interconnect structure 140. In oneembodiment, support tape 150 includes a thermally resistant tape,warpage balancing tape, or other tape. For example, support tape 150 mayinclude a material having high thermal conductivity and high heatresistance. Alternatively, reconstituted panel 290 is placed in asupporting jig with or without support tape 150.

In FIG. 13c , reconstituted panel 290 is singulated through interconnectstructure 140 and RDL side teeth 294 into individual modules 292. In oneembodiment, modules 292 are singulated from the front side. A portion ofRDL side teeth 294 are exposed from module 292 after singulation toprovide connectivity.

In FIG. 13d , a shielding layer 170 is formed over RDL side teeth 294and encapsulant 136. Shielding layer 170 can be Al, ferrite or carbonyliron, stainless steel, nickel silver, low-carbon steel, silicon-ironsteel, foil, conductive resin, and other metals and composites capableof blocking or absorbing EMI, RFI, harmonic distortion, and otherinter-device interference. Shielding layer 170 is patterned andconformally deposited using an electrolytic plating, electrolessplating, sputtering, PVD, CVD, or other suitable metal depositionprocess. Shielding layer 170 can also be a non-metal material such ascarbon-black or aluminum flake to reduce the effects of EMI and RFI. Fornon-metal materials, shielding layer 170 can be applied by lamination,spraying, or painting. Shielding layer 170 is electrically connectedthrough RDL 144 by RDL side teeth 294 to an external low-impedanceground point. Shielding layer 170 encapsulates module 292. Shieldinglayer 170 substantially covers all areas of encapsulant 136 relative tothe top of semiconductor die 84 or components 120-124 to provideprotection for the enclosed semiconductor devices against EMI, RFI, orother inter-device interference. The interference can be generatedinternally or come from external semiconductor devices containing IPDsor RF circuits. Shielding layer 170 also substantially covers all areasof encapsulant 136 relative to the sides of module 292.

FIG. 13e shows support tape 150 removed from over interconnect structure140 to form EMI shielded module 296. EMI shielded module 296 includes anLC circuit with EMI shielding. Shielding layer 170 encapsulates EMIshielded module 296. Shielding layer 170 extends completely aroundsemiconductor die 84 or components 120-124. Shielding layer 170substantially covers all areas of encapsulant 136 relative to the top ofsemiconductor die 84 or components 120-124 to provide protection for theenclosed semiconductor devices against EMI, RFI, or other inter-deviceinterference. The interference can be generated internally or come fromexternal semiconductor devices containing IPDs or RF circuits. Shieldinglayer 170 also substantially covers all areas of encapsulant 136relative to the sides of EMI shielded module 296. A portion of RDL 144forms a ground plane. RDL side teeth 294 provide an electricalconnection between shielding layer 170 and RDL 144 as part of an EMIshield. RDL 144 provides a grounding connection. Shielding layer 170,RDL 144, and RDL side teeth 294, surround semiconductor die 84 orcomponents 120-124 as part of a faraday cage providing EMI and RFIshielding to EMI shielded module 296. Shielding layer 170, RDL 144, andRDL side teeth 294 surround semiconductor die 84 or components 120-124and route EMI, RFI, and other interfering signals from shielding layer170 to an external low-impedance ground point. Accordingly, shieldinglayer 170, RDL 144, and RDL side teeth 294 provide effective EMI and RFIshielding for EMI shielded module 296. In one embodiment, components120-124 form an LC circuit.

FIG. 13f shows EMI shielded module 298 with shielding layer 170deposited over encapsulant 136 and exposed side surfaces of interconnectstructure 140. Shielding layer 170, RDL 144, and RDL side teeth 294,surround semiconductor die 84 or components 120-124 as part of a faradaycage providing EMI and RFI shielding to EMI shielded module 298.

FIGS. 14a-14d illustrate, in relation to FIGS. 13a-13f , an alternativemethod of making an EMI shielded module without trenches formed in theencapsulant. FIG. 14a shows a cross-sectional view of a portion ofreconstituted panel 300 comprising modules 302, similar to reconstitutedpanel 290 from FIG. 13a , but without RDL side teeth 294. An encapsulantor molding compound 136 deposited over reconstituted panel 300 includingcomponents 120-124, using a paste printing, compressive molding,transfer molding, liquid encapsulant molding, vacuum lamination, orother suitable applicator. In one embodiment, encapsulant 136 isdeposited using film-assisted molding process. Encapsulant 136 can bepolymer composite material, such as epoxy resin with filler, epoxyacrylate with filler, or polymer with proper filler. Encapsulant 136 isnon-conductive, provides physical support, and environmentally protectsthe semiconductor device from external elements and contaminants. Activesurfaces 90 of components 120-124 are exposed after carrier 130 andinterface layer 132 are removed, as shown in FIG. 14 a.

A build-up interconnect structure 140 is formed over components 120-124and encapsulant 136. Insulating or passivation layer 142 is formed overa surface of components 120-124 and encapsulant 136 using PVD, CVD,printing, spin coating, spray coating, sintering or thermal oxidation.Insulating layer 142 contains one or more layers of SiO2, Si3N4, SiON,Ta2O5, Al2O3, or other material having similar insulating and structuralproperties. A portion of insulating layer 142 is removed by an etchingprocess to expose portions of components 120-124.

An electrically conductive layer 144 is formed over insulating layer 142and components 120-124 using a patterning and metal deposition processsuch as PVD, CVD, sputtering, electrolytic plating, electroless seedlayer deposition, and electroless plating. Conductive layer 144 includesone or more layers of Al, Cu, Ti, TiW, tin Sn, Ni, Au, Ag, W, or othersuitable electrically conductive material or combination thereof.Conductive layer 144 operates as an RDL ground plane to provide EMIshielding for module 284. In one embodiment, conductive layer 144operates as an RDL to redistribute electrical connection from components120-124 to outside a footprint of module 284. One portion of conductivelayer 144 is electrically connected to contact pads 92 of components120-124. Other portions of conductive layer 144 are electrically commonor electrically isolated depending on the design and function of thesemiconductor device.

An insulating or passivation layer 146 is formed over insulating layer142 and conductive layer 144 using PVD, CVD, printing, spin coating,spray coating, sintering or thermal oxidation. Insulating layer 146includes one or more layers of SiO2, Si3N4, SiON, Ta2O5, Al2O3, lowtemperature curable polymer dielectric resist (i.e., cures at less than250° C.), BCB, PBO, or epoxy based photosensitive polymer dielectric, orother material having similar insulating and structural properties. Aportion of insulating layer 146 is removed by LDA or an etching processthrough a patterned photoresist layer to expose portions of conductivelayer 144.

In FIG. 14b , an electrically conductive bump material is deposited overmodules 302 and electrically connected to conductive layer 144 using anevaporation, electrolytic plating, electroless plating, ball drop, orscreen printing process. The bump material includes Al, Sn, Ni, Au, Ag,Pb, Bi, Cu, solder, or combinations thereof, with an optional fluxsolution. For example, the bump material can be eutectic Sn/Pb,high-lead solder, or lead-free solder. The bump material is bonded toconductive layer 144 using a suitable attachment or bonding process. Inone embodiment, the bump material is reflowed by heating the materialabove its melting point to form spherical balls or bumps 148. In someapplications, bumps 148 are reflowed a second time to improve electricalcontact to conductive layer 144. The bumps can also be compressionbonded to conductive layer 144. Bumps 148 represent one type ofinterconnect structure that is formed over conductive layer 144. Theinterconnect structure can also use bond wires, stud bump, micro bump,or other electrical interconnect. Bumps 148 or other interconnectstructures are optional, and in one embodiment, are formed aftersingulation of reconstituted panel 300.

Backgrinding tape or support tape 150 is applied over reconstitutedpanel 300 and in contact with interconnect structure 140. In oneembodiment, support tape 150 includes a thermally resistant tape,warpage balancing tape, or other tape. For example, support tape 150 mayinclude a material having high thermal conductivity and high heatresistance. Alternatively, reconstituted panel 300 is placed in asupporting jig with or without support tape 150.

Reconstituted panel 300 is singulated with saw blade or laser cuttingdevice 166 through interconnect structure 140 into individual modules302, as shown in FIG. 14b . In one embodiment, saw blade 166 singulatesmodules 302 from the front side. A plurality of vias 304 is formedthrough encapsulant 136 to back surface 88 of components 120-124 usinglaser drilling, mechanical drilling, or DRIE. Vias 304 expose backsurface 88 of components 120-124 from encapsulant 136.

In FIG. 14c , vias 304 are filled with conductive material to formpassive pads 306. A shielding layer 170 is formed over encapsulant 136and passive pads 306. In one embodiment, passive pads 306 and shieldinglayer 170 are formed simultaneously. Shielding layer 170 can be Al,ferrite or carbonyl iron, stainless steel, nickel silver, low-carbonsteel, silicon-iron steel, foil, conductive resin, and other metals andcomposites capable of blocking or absorbing EMI, RFI, harmonicdistortion, and other inter-device interference. Shielding layer 170 ispatterned and conformally deposited using an electrolytic plating,electroless plating, sputtering, PVD, CVD, or other suitable metaldeposition process. Shielding layer 170 can also be a non-metal materialsuch as carbon-black or aluminum flake to reduce the effects of EMI andRFI. For non-metal materials, shielding layer 170 can be applied bylamination, spraying, or painting. Shielding layer 170 is electricallyconnected through passive pads 306, components 120-124, and RDL 144 toan external low-impedance ground point. Shielding layer 170 encapsulatesmodule 302. Shielding layer 170 substantially covers all areas ofencapsulant 136 relative to the top of semiconductor die 84 orcomponents 120-124 to provide protection for the enclosed semiconductordevices against EMI, RFI, or other inter-device interference. Theinterference can be generated internally or come from externalsemiconductor devices containing IPDs or RF circuits. Shielding layer170 also substantially covers all areas of encapsulant 136 relative tothe sides of module 302. Shielding layer 170 in vias 304 form passivepads 306.

FIG. 14d shows support tape 150 removed from over interconnect structure140 to form EMI shielded module 308, similar to EMI shielded module 296from FIG. 13e . EMI shielded module 308 employs passive pads 306 ratherthan RDL side teeth 294 to provide electrical connectivity betweenshielding layer 170 and the remainder of EMI shielded module 308. Vias304 through encapsulant 136 to back surface 88 of components 120-124 arefilled with conductive material to form passive pads 306. EMI shieldedmodule 308 includes an LC circuit with EMI shielding. Shielding layer170 encapsulates EMI shielded module 308. Shielding layer 170 extendscompletely around semiconductor die 84 or components 120-124. Shieldinglayer 170 substantially covers all areas of encapsulant 136 relative tothe top of semiconductor die 84 or components 120-124 to provideprotection for the enclosed semiconductor devices against EMI, RFI, orother inter-device interference. The interference can be generatedinternally or come from external semiconductor devices containing IPDsor RF circuits. Shielding layer 170 also substantially covers all areasof encapsulant 136 relative to the sides of EMI shielded module 308. Aportion of RDL 144 forms a ground plane. Passive pads 306 provide anelectrical connection between shielding layer 170, components 120-124,and RDL 144 as part of an EMI shield. RDL 144 provides a groundingconnection. Shielding layer 170, RDL 144, and passive pads 306, surroundsemiconductor die 84 or components 120-124 as part of a faraday cageproviding EMI and RFI shielding to EMI shielded module 308. Shieldinglayer 170, passive pads 306, and RDL 144 surround semiconductor die 84or components 120-124 and route EMI, RFI, and other interfering signalsfrom shielding layer 170 and passive pads 306 to an externallow-impedance ground point. Accordingly, shielding layer 170, passivepads 306, and RDL 144 provide effective EMI and RFI shielding for EMIshielded module 308. In one embodiment, components 120-124 form an LCcircuit.

FIGS. 15a-15e illustrate, in relation to FIGS. 14a-14d , alternate EMIshielded modules including semiconductor die. FIG. 15a shows across-sectional view of EMI shielded module 320. EMI shielded module 320includes semiconductor die 84 from FIG. 2d , components 120-124,encapsulant 136, interconnect structure 140, bumps 148, and shieldinglid 228. EMI shielded module 320 also includes PCB units 322. PCB units322 may be disposed in the corners of EMI shielded module 320, similarto corner PCB units 100. In one embodiment, PCB units 322 may bedisposed along each side of EMI shielded module 320, similar to long PCBunits 190. PCB units 322 have a height less than a height of components120-124. PCB units 322 act as modular interconnect structures providingconnectivity to EMI shielded module 320. PCB unit 322 is singulated toform EMI shielded module 320. EMI shielded module 320 also includesthermally conductive layer 226 applied over conductive layer 106 and PTH108 of PCB unit 322. Shielding lid 228 is formed over semiconductor die84, components 120-124, encapsulant 136, and thermally conductive layer226. Shielding lid 228 can be Cu, Al, ferrite or carbonyl iron,stainless steel, nickel silver, low-carbon steel, silicon-iron steel,foil, conductive composite, and other metals and composites capable ofblocking or absorbing EMI, RFI, harmonic distortion, and otherinter-device interference. Shielding lid 228 is patterned andconformally deposited using an electrolytic plating, electrolessplating, sputtering, PVD, CVD, or other suitable metal depositionprocess. In one embodiment, shielding lid 228 includes an outer layerwith improved anti-corrosive properties. Shielding lid 228 can also be anon-metal material such as carbon-black or aluminum flake to reduce theeffects of EMI and RFI. For non-metal materials, shielding lid 228 canbe applied by lamination, spraying, or painting. Shielding lid 228 iselectrically connected through thermally conductive layer 226, optionalconductive layer 106, PTH 108, and conductive layer 104 of PCB unit 322,and RDL 144 to an external low-impedance ground point. In oneembodiment, shielding lid 228 is pre-formed and attached, via thermallyconductive layer 226, to EMI shielded module 320.

FIG. 15a shows EMI shielded module 320 including semiconductor die 84and an LC circuit with EMI shielding. Shielding lid 228 forms aconductive lid over EMI shielded module 320. PCB units 322, RDL 144,thermally conductive layer 226, and shielding lid 228 extend completelyaround semiconductor die 84 and components 120-124. Shielding lid 228substantially covers all areas of encapsulant 136 relative to the top ofsemiconductor die 84 and components 120-124 to provide protection forthe enclosed semiconductor devices against EMI, RFI, or otherinter-device interference. PCB units 322 provides protection for theenclosed semiconductor devices against EMI, RFI, or other inter-deviceinterference relative to the sides of EMI shielded module 320. Theinterference can be generated internally or come from externalsemiconductor devices containing IPDs or RF circuits. RDL 144 forms aground plane. PCB units 322 and thermally conductive layer 226 providean electrical connection between shielding lid 228 and RDL 144. PCBunits 322 provide a grounding connection. PCB units 322, RDL 144,thermally conductive layer 226, and shielding lid 228 surroundsemiconductor die 84 and components 120-124 as part of a faraday cageproviding EMI and RFI shielding to EMI shielded module 320. PCB units322, RDL 144, thermally conductive layer 226, and shielding lid 228surround semiconductor die 84 and components 120-124 and route EMI, RFI,and other interfering signals from PCB units 322, RDL 144, thermallyconductive layer 226, and shielding lid 228 to an external low-impedanceground point. Accordingly, PCB units 322, RDL 144, thermally conductivelayer 226, and shielding lid 228 provide effective EMI and RFI shieldingfor EMI shielded module 320. In one embodiment, shielding lid 228 iscoplanar with back surface 88 of semiconductor die 84.

FIG. 15b shows a cross-sectional view of EMI shielded module 330. EMIshielded module 330 includes semiconductor die 84 from FIG. 2d ,components 120-124, encapsulant 136, interconnect structure 140, bumps148, and shielding lid 228. EMI shielded module 320 also includes PCBunits 332. PCB units 332 may be disposed in the corners of EMI shieldedmodule 330, similar to corner PCB units 100. In one embodiment, PCBunits 332 may be disposed along each side of EMI shielded module 330,similar to long PCB units 190. PCB units 332 have a height less than aheight of components 120-124 or semiconductor die 84. PCB units 332 actas modular interconnect structures providing connectivity to EMIshielded module 330. PCB units 332 have a width less than a width of PCBunits 322. PCB units 332 are not singulated to form EMI shielded module330. EMI shielded module 330 also includes thermally conductive layer226 applied over conductive layer 106 and PTH 108 of PCB unit 332.

FIG. 15b shows EMI shielded module 330 including semiconductor die 84and an LC circuit with EMI shielding. PCB units 332, RDL 144, thermallyconductive layer 226, and shielding lid 228 surround semiconductor die84 and components 120-124 as part of a faraday cage providing EMI andRFI shielding to EMI shielded module 330. In one embodiment, shieldinglid 228 is coplanar with back surface 88 of semiconductor die 84.

FIG. 15c shows a cross-sectional view of EMI shielded module 340. EMIshielded module 340 includes semiconductor die 84 from FIG. 2d ,components 120-124, encapsulant 136, interconnect structure 140, andbumps 148. EMI shielded module 340 includes shielding lid 228 withconductive pillars 344. Shielding lid 228 and conductive pillars 344 canbe Al, ferrite or carbonyl iron, stainless steel, nickel silver,low-carbon steel, silicon-iron steel, foil, conductive resin, and othermetals and composites capable of blocking or absorbing EMI, RFI,harmonic distortion, and other inter-device interference. Shielding lid228 is patterned and conformally deposited using an electrolyticplating, electroless plating, sputtering, PVD, CVD, or other suitablemetal deposition process. Shielding lid 228 and conductive pillars 344can also be a non-metal material such as carbon-black or aluminum flaketo reduce the effects of EMI and RFI. For non-metal materials, shieldinglid 228 with conductive pillars 344 can be applied by lamination,spraying, or painting. Shielding lid 228 is electrically connectedthrough conductive pillars 344, thermally conductive layer 226, optionalconductive layer 106, PTH 108, and conductive layer 104 of PCB unit 342,and RDL 144 to an external low-impedance ground point.

EMI shielded module 340 also includes PCB units 342. PCB units 342 maybe disposed in the corners of EMI shielded module 340, similar to cornerPCB units 100. In one embodiment, PCB units 342 may be disposed alongeach side of EMI shielded module 340, similar to long PCB units 190. PCBunits 342 have a height less than a height of components 120-124 orsemiconductor die 84. PCB units 342 act as modular interconnectstructures providing connectivity to EMI shielded module 340. In oneembodiment, PCB unit 342 is singulated to form EMI shielded module 340.EMI shielded module 340 also includes thermally conductive layer 226applied over conductive layer 106 and PTH 108 of PCB unit 342. Shieldinglid 228 including conductive pillars 344 is disposed over thermallyconductive layer 226.

FIG. 15c shows EMI shielded module 340 including semiconductor die 84and an LC circuit with EMI shielding. PCB units 342, RDL 144, thermallyconductive layer 226, conductive pillars 344, and shielding lid 228surround semiconductor die 84 and components 120-124 as part of afaraday cage providing EMI and RFI shielding to EMI shielded module 340.In one embodiment, shielding lid 228 is coplanar with back surface 88 ofsemiconductor die 84.

FIG. 15d shows a cross-sectional view of EMI shielded module 350. EMIshielded module 350 includes semiconductor die 84 from FIG. 2d ,components 120-124, encapsulant 136, interconnect structure 140, andbumps 148. EMI shielded module 320 also includes thermally conductivelayer 226 applied over conductive layer 144. A shielding cage 352 isdisposed over thermally conductive layer 226 and encapsulant 136.Shielding cage 352 can be Al, ferrite or carbonyl iron, stainless steel,nickel silver, low-carbon steel, silicon-iron steel, foil, conductiveresin, and other metals and composites capable of blocking or absorbingEMI, RFI, harmonic distortion, and other inter-device interference.Shielding cage 352 is patterned and conformally deposited using anelectrolytic plating, electroless plating, sputtering, PVD, CVD, orother suitable metal deposition process. Shielding cage 352 can also bea non-metal material such as carbon-black or aluminum flake to reducethe effects of EMI and RFI. For non-metal materials, shielding cage 352can be applied by lamination, spraying, or painting. Shielding cage 352is electrically connected through thermally conductive layer 226 and RDL144 to an external low-impedance ground point. In one embodiment,shielding cage 352 is pre-formed and attached, via thermally conductivelayer 226, to interconnect structure 140 of EMI shielded module 350.

FIG. 15d shows EMI shielded module 350 including semiconductor die 84and an LC circuit with EMI shielding. Shielding cage 352 is disposedover encapsulant 136. RDL 144, thermally conductive layer 226, andshielding cage 352 surround semiconductor die 84 and components 120-124as part of a faraday cage providing EMI and RFI shielding to EMIshielded module 350. In one embodiment, shielding cage 352 is coplanarwith back surface 88 of semiconductor die 84.

FIG. 15e shows a cross-sectional view of EMI shielded module 360. EMIshielded module 360 includes semiconductor die 84 from FIG. 2d ,components 120-124, encapsulant 136, interconnect structure 140, andbumps 148. EMI shielded module 320 also includes thermally conductivelayer 226 applied over conductive layer 144. A shielding cage 362 isformed over interconnect structure 140, thermally conductive layer 226,and encapsulant 136. Shielding cage 362 can be Al, ferrite or carbonyliron, stainless steel, nickel silver, low-carbon steel, silicon-ironsteel, foil, conductive resin, and other metals and composites capableof blocking or absorbing EMI, RFI, harmonic distortion, and otherinter-device interference. Shielding cage 362 is patterned andconformally deposited using an electrolytic plating, electrolessplating, sputtering, PVD, CVD, or other suitable metal depositionprocess. Shielding cage 362 can also be a non-metal material such ascarbon-black or aluminum flake to reduce the effects of EMI and RFI. Fornon-metal materials, shielding cage 362 can be applied by lamination,spraying, or painting. Shielding cage 362 is electrically connectedthrough thermally conductive layer 226 and RDL 144 to an externallow-impedance ground point. In one embodiment, shielding cage 362 ispre-formed and attached, via thermally conductive layer 226, tointerconnect structure 140 of EMI shielded module 360.

FIG. 15e shows EMI shielded module 360 including semiconductor die 84and an LC circuit with EMI shielding. Shielding cage 362 encapsulatesEMI shielded module 360. RDL 144, thermally conductive layer 226, andshielding cage 362 surround semiconductor die 84 and components 120-124as part of a faraday cage providing EMI and RFI shielding to EMIshielded module 360. In one embodiment, shielding cage 362 is coplanarwith back surface 88 of semiconductor die 84.

FIGS. 16a-16d illustrate, in relation to FIGS. 5a-5m , an alternativemethod of making an EMI shielded module with alternate PCB unitsdisposed in each corner of the EMI shielded module. In the presentembodiment, PCB units 370, disposed in each corner of module 376 replacecorner PCB units 100 of module 118. PCB units 370 include base material372 and PTH 374, as shown in FIGS. 16a-16b . PCB units 370 aresubstantially the same size as PCB units 100.

FIG. 16a shows a cross-sectional view of PCB unit 370. Base material 372of PCB unit 370 can be metal, silicon, polymer, polymer composite,ceramic, glass, glass epoxy, beryllium oxide, or other suitablelow-cost, rigid material or bulk semiconductor material for structuralsupport. Alternatively, base material 372 can be one or more laminatedlayers of polytetrafluoroethylene pre-impregnated (prepreg), FR-4, FR-1,CEM-1, or CEM-3 with a combination of phenolic cotton paper, epoxy,resin, woven glass, matte glass, polyester, and other reinforcementfibers or fabrics. Circular PTH 374 are formed through base material 372of PCB unit 370. In one embodiment, only one circular PTH 374 is formedin each PCB unit 370. PTH 374 represent one type of PTH that is formedthrough base material 372. The PTH could also be star-shaped,plus-shaped, post-shaped, concentric circles, square, rectangle, or anyother shape. FIG. 16b shows a plan view of alternate PCB unit 370.

FIG. 16c shows a plan view of a portion of a layout for forming modules376 with three components 120-124. FIG. 16c shows four modules 376,although any number of modules may be formed. Each corner of each module376 includes PCB unit 370. The layout shown in FIG. 16c includes aseparation region or saw street 126 between each module 376. Components120-124 may be semiconductor die 84 containing IPDs, or discrete passivedevices such as inductors, capacitors, and resistors. In one embodiment,components 120 and 122 are inductors and component 124 is a capacitorwith specifications listed in Table 1.

FIG. 16d shows EMI shielded module 378. EMI shielded module 378 includesan LC circuit with EMI shielding. Shielding layer 170 encapsulates EMIshielded module 378. Shielding layer 170 extends completely aroundsemiconductor die 84 or components 120-124. Shielding layer 170substantially covers all areas of encapsulant 136 relative to the top ofsemiconductor die 84 or components 120-124 to provide protection for theenclosed semiconductor devices against EMI, RFI, or other inter-deviceinterference. The interference can be generated internally or come fromexternal semiconductor devices containing IPDs or RF circuits. Shieldinglayer 170 also substantially covers all areas of encapsulant 136relative to the sides of EMI shielded module 378. RDL 144 forms a groundplane. PTH 374 of PCB units 370 provides an electrical connectionbetween shielding layer 170 and RDL 144. PCB units 370 provide agrounding connection. PCB units 370, RDL 144, and shielding layer 170surround semiconductor die 84 or components 120-124 as part of a faradaycage providing EMI and RFI shielding to EMI shielded module 378. PCBunits 370, RDL 144, and shielding layer 170 surround semiconductor die84 or components 120-124 and route EMI, RFI, and other interferingsignals from shielding layer 170 to an external low-impedance groundpoint. Accordingly, PCB units 370, RDL 144, and shielding layer 170provide effective EMI and RFI shielding for EMI shielded module 378. PCBunits 370 have a height less than a height of semiconductor die 84 orcomponents 120-124. PCB unit 370 acts as a modular interconnectstructure providing connectivity to EMI shielded module 378. In oneembodiment, components 120-124 form an LC circuit.

FIGS. 17a-17b illustrate, in relation to FIGS. 16a-16d , an alternativemethod of making an EMI shielded module with longer PCB units disposedalong each side of the EMI shielded module. In the present embodiment,longer PCB units 380, disposed along the edges of module 382 replacecorner PCB units 370 of module 376. PCB units 380 include base material372 and PTH 374, as shown in FIG. 16a . PCB units 380 are longer thanPCB units 370. In one embodiment, some PCB units 380 are approximately 3mm in length while other PCB units 380 are approximately 5 mm in length.FIG. 17a shows a plan view of a portion of reconstituted panel 384. EachPCB unit 380 contains multiple PTHs 374.

FIG. 17b shows EMI shielded module 386. EMI shielded module 386 includesan LC circuit with EMI shielding. Shielding layer 170 encapsulates EMIshielded module 386. Shielding layer 170 extends completely aroundsemiconductor die 84 or components 120-124. Shielding layer 170substantially covers all areas of encapsulant 136 relative to the top ofsemiconductor die 84 or components 120-124 to provide protection for theenclosed semiconductor devices against EMI, RFI, or other inter-deviceinterference. The interference can be generated internally or come fromexternal semiconductor devices containing IPDs or RF circuits. Shieldinglayer 170 also substantially covers all areas of encapsulant 136relative to the sides of EMI shielded module 386. RDL 144 forms a groundplane. PTHs 374 of PCB units 380 provide an electrical connectionbetween shielding layer 170 and RDL 144 as part of an EMI shield. PCBunits 380 provide a grounding connection. PCB units 380, RDL 144, andshielding layer 170 surround semiconductor die 84 or components 120-124as part of a faraday cage providing EMI and RFI shielding to EMIshielded module 386. PCB units 380, RDL 144, and shielding layer 170surround semiconductor die 84 or components 120-124 and route EMI, RFI,and other interfering signals from shielding layer 170 to an externallow-impedance ground point. Accordingly, PCB units 380, RDL 144, andshielding layer 170 provide effective EMI and RFI shielding for EMIshielded module 386. PCB units 380 have a height less than a height ofcomponents 120-124. PCB units 380 act as modular interconnect structuresproviding connectivity to EMI shielded module 386. In one embodiment,components 120-124 form an LC circuit.

While one or more embodiments of the present invention have beenillustrated in detail, the skilled artisan will appreciate thatmodifications and adaptations to those embodiments may be made withoutdeparting from the scope of the present invention as set forth in thefollowing claims.

What is claimed:
 1. A method of making a semiconductor device,comprising: providing a carrier; disposing a discrete capacitor on thecarrier; disposing a discrete inductor on the carrier adjacent to thediscrete capacitor; disposing a shielding cage on the carrier over thediscrete capacitor and discrete inductor, wherein the shielding cageincludes an opening formed through the shielding cage; depositing anencapsulant over the carrier, discrete capacitor, discrete inductor, andshielding cage, wherein the encapsulant flows through the opening of theshielding cage; removing the carrier to expose the discrete capacitor,discrete inductor, and shielding cage after depositing the encapsulant;and forming a build-up interconnect structure over the discretecapacitor, discrete inductor, shielding cage, and encapsulant afterremoving the carrier.
 2. The method of claim 1, further including:disposing a conductive adhesive on the shielding cage; and forming thebuild-up interconnect structure connected to the shielding cage throughthe conductive adhesive.
 3. The method of claim 1, wherein the shieldingcage comprises an electrically conductive mesh.
 4. The method of claim1, further including: disposing a thermal interface material on thediscrete capacitor or discrete inductor, wherein the thermal interfacematerial includes an adhesive; and disposing the shielding cage incontact with the thermal interface material.
 5. The method of claim 4,further including grinding the encapsulant to expose a portion of theshielding cage.
 6. A method of making a semiconductor device,comprising: providing a carrier; disposing a discrete capacitor over thecarrier; disposing a discrete inductor over the carrier adjacent to thediscrete capacitor; disposing a shielding cage over the carrier,discrete capacitor, and discrete inductor; depositing an encapsulantover the discrete capacitor, discrete inductor, and shielding cage;removing the carrier after depositing the encapsulant; and forming aninterconnect structure over the encapsulant and electrically connectedto the shielding cage after removing the carrier, wherein theinterconnect structure includes a build-up interconnect structureelectrically connected to the shielding cage, discrete inductor, anddiscrete capacitor.
 7. The method of claim 6, further includingproviding a conductive adhesive between the shielding cage and build-upinterconnect structure.
 8. The method of claim 6, wherein the shieldingcage comprises an electrically conductive mesh.
 9. The method of claim6, further including: disposing a thermal interface material on thediscrete capacitor or discrete inductor; and disposing the shieldingcage in contact with the thermal interface material.
 10. The method ofclaim 9, wherein a portion of the shielding cage is exposed from theencapsulant.
 11. The method of claim 6, further including: providing acarrier; disposing the discrete capacitor, discrete inductor, andshielding cage on the carrier; and depositing the encapsulant over thecarrier.
 12. A method of making a semiconductor device, comprising:providing a discrete inductor; disposing a shielding cage over thediscrete inductor; depositing an encapsulant over the discrete inductorand shielding cage; and forming an interconnect structure over thediscrete inductor and encapsulant after depositing the encapsulant,wherein the interconnect structure includes a build-up interconnectstructure electrically connected to the shielding cage and discreteinductor.
 13. The method of claim 12, further including depositing theencapsulant through an opening in the shielding cage.
 14. The method ofclaim 12, further including disposing a conductive adhesive between theshielding cage and interconnect structure.
 15. The method of claim 12,further including a disposing thermal interface material between thediscrete inductor and shielding cage.
 16. The method of claim 12,further including depositing the encapsulant using film-assisted moldingto leave the shielding cage exposed from the encapsulant.
 17. Asemiconductor device, comprising: a discrete inductor; a thermalinterface material disposed over the discrete inductor; a shielding cagedisposed over the discrete inductor with the thermal interface materialbetween the shielding cage and discrete inductor; and an encapsulantdeposited over the shielding cage and between the discrete inductor andshielding cage.
 18. The semiconductor device of claim 17, furtherincluding an interconnect structure formed over the encapsulant.
 19. Thesemiconductor device of claim 18, wherein the shielding cage is exposedfrom the encapsulant opposite the interconnect structure.
 20. Thesemiconductor device of claim 18, further including a conductiveadhesive between the shielding cage and interconnect structure.
 21. Thesemiconductor device of claim 17, wherein the shielding cage includes amesh.